Poster session II

POSTER · MW6

Presentations

  • Negative ion formation in potassium-adenine collisions

    POSTER

    Authors

    • T. Chunha

      Univ Nova de Lisboa

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Electron cross-sections and transport in liquids and biomolecules

    POSTER

    Authors

    • Ronald White

      James Cook University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Elastic Electron Scattering from Hexafluoropropene

    POSTER

    Authors

    • Leigh Hargreaves

      California State University Fullerton, Cal State University Fullerton, USA

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Study of inelastic e-Cd and e-Zn collisions

    POSTER

    Authors

    • Mariusz Piwinski

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Lukasz Klosowski

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Darek Dziczek

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Stanislaw Chwirot

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    View abstract →

  • Efficient thermoelectric trap for metal vapours suitable for high-vacuum system

    POSTER

    Authors

    • Mariusz Piwinski

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Lukasz Klosowski

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Darek Dziczek

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Stanislaw Chwirot

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

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  • Coulomb crystal as a detector in electron impact ionization experiment

    POSTER

    Authors

    • Lukasz Klosowski

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Mariusz Piwinski

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Szymon Wojtewicz

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Daniel Lisak

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Darek Dziczek

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    • Stanislaw Chwirot

      Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Torun, Grudziadzka 5, 87-100 Torun, Poland

    View abstract →

  • An out-of-plane ($e,2e$) study of He autoionization from 80 to 488 eV incident energies

    POSTER

    Authors

    • B.A. deHarak

      Illinois Wesleyan Univ., Illinois Wesleyan University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Ternary recombination of H$_{3}^{+}$, H$_{2}$D$^{+}$, HD$_{2}^{+}$, and D$_{3}^{+}$ with electrons in He/Ar/H$_{2}$/D$_{2}$ gas mixtures

    POSTER

    Authors

    • Abel Kalosi

      Charles University in Prague, Prague 18000, Czech Republic

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Stationary-Afterglow measurements of dissociative recombination of H$_{2}$D$^{+}$ and HD$_{2}^{+}$ ions

    POSTER

    Authors

    • Petr Dohnal

      Charles University in Prague, Prague 18000, Czech Republic

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • Computational Study on Dissociation Properties of C$_{\mathrm{4}}$F$_{\mathrm{6}}$ Molecules

    POSTER

    Authors

    • Heechol Choi

      Plasma Technology Research Center, National Fusion Research Institute

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Transport coefficients of He$^{\mathrm{+}}$ ions in helium

    POSTER

    Authors

    • Rainer Johnsen

      Department of Physics and Astronomy, University of Pittsburgh, Pittsburgh PA 15260, USA, University of Pittsburgh

    • Larry Viehland

      Chatham University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Timothy Wright

      University of Nottingham

    View abstract →

  • Transport Parameters For Positive IONS In Pure H$_{\mathrm{2}}$O DC Discharge

    POSTER

    Authors

    • Zoran Petrovic

      Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia, Inst of Physics., University of Belgrade, P.O.Box 68, 11080, Belgrade, Serbia

    • Vladimir Stojanovic

      Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia, Inst of Physics., University of Belgrade, P.O.Box 68, 11080, Belgrade, Serbia

    • Jasmina Jovanovic

      Faculty of Mechanical Engieneering, University of Belgrade, Kraljice Marije 16, 11000 Belgrade, Serbia

    • Dragana Maric

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia, Inst of Physics., University of Belgrade, P.O.Box 68, 11080, Belgrade, Serbia

    View abstract →

  • Third order transport coefficients for electrons and positrons in gases

    POSTER

    Authors

    • Sasa Dujko

      Institute of Physics, University of Belgrade, Serbia

    • Ilija Simonovic

      Institute of Physics, University of Belgrade, Serbia

    • Ron White

      College of Science, Technology & Engineering, James Cook University, Australia, James Cook University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • Transport properties of electrons and transition of an electron avalanche into a streamer in atomic liquids

    POSTER

    Authors

    • Sasa Dujko

      Institute of Physics, University of Belgrade, Serbia

    • Ilija Simonovic

      Institute of Physics, University of Belgrade, Serbia

    • Gregory Boyle

      College of Science, Technology & Engineering, James Cook University, Australia

    • Ron White

      College of Science, Technology & Engineering, James Cook University, Australia, James Cook University

    • Danko Bosnjakovic

      Institute of Physics, University of Belgrade, Serbia

    • Zoran Petrovic

      University of Belgrade, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Institute of Physics, University of Belgrade, Serbia

    View abstract →

  • Monte Carlo simulations of electron transport in strongly attaching gases

    POSTER

    Authors

    • Zoran Petrovic

      University of Belgrade, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Institute of Physics, University of Belgrade, Serbia

    • Jasmina Miric

      Institute of Physics, University of Belgrade, Serbia

    • Ilija Simonovic

      Institute of Physics, University of Belgrade, Serbia

    • Danko Bosnjakovic

      Institute of Physics, University of Belgrade, Serbia

    • Sasa Dujko

      Institute of Physics, University of Belgrade, Serbia

    View abstract →

  • Electron transport in mercury vapor: magnetic field effects, dimer induced NDC and multi-term analysis

    POSTER

    Authors

    • Zoran Petrovic

      University of Belgrade, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Institute of Physics, University of Belgrade, Serbia

    • Jasmina Miric

      Institute of Physics, University of Belgrade, Serbia

    • Ilija Simonovic

      Institute of Physics, University of Belgrade, Serbia

    • Sasa Dujko

      Institute of Physics, University of Belgrade, Serbia

    View abstract →

  • On the role of helium molecules in atmospheric pressure discharges

    POSTER

    Authors

    • Emile Carbone

      Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • The electron heating mode transition by the change of driving frequency in atmospheric pressure dielectric barrier discharges

    POSTER

    Authors

    • Jung Yeol Lee

      Department of Electrical Engineering, Pusan National University, Busan

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • Inter-comparison of calculation techniques of the electron Boltzmann equation for the analysis of swarm parameters in CO$_{\mathrm{2}}$

    POSTER

    Authors

    • M Grofulovi\'c

      IST/IPFN, University of Lisbon, Lisbon

    • N Pinh\~ao

      IST/IPFN, University of Lisbon, Lisbon

    • LL Alves

      IST/IPFN, University of Lisbon, Lisbon

    • V Guerra

      IST Lisbon, Portugal, IST/IPFN, University of Lisbon, Lisbon

    • D. Loffhagen

      Leibniz Institute for Plasma Science and Technology, Leibniz Institute for Plasma Science and Technology, Germany, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

    • I Korolov

      Institute for Solid State Physics and Optics, Budapest

    • M Vass

      Institute for Solid State Physics and Optics, Budapest

    • Zoltan Donko

      Institute for Solid State Physics and Optics, Budapest, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Hungary, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary

    View abstract →

  • Effects Of Electrons and Heavy Particles On Halpha Emission In Pure H$_{\mathrm{2}}$O DC Discharge At High E/N (E-Electric Field, N-Gas Density)

    POSTER

    Authors

    • Zoran Petrovic

      Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia, Inst of Physics., University of Belgrade, P.O.Box 68, 11080, Belgrade, Serbia

    • Vladimir Stojanovic

      Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia, Inst of Physics., University of Belgrade, P.O.Box 68, 11080, Belgrade, Serbia

    • Nikola Skoro

      Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia

    • Jelena Sivos

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia

    • Dragana Maric

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia, Inst of Physics., University of Belgrade, P.O.Box 68, 11080, Belgrade, Serbia

    • Gordana Malovic

      Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia

    View abstract →

  • Numerical Investigation of Propagation and Decay of Fast Ionization Waves Generated by Nanosecond Pulsed Discharge

    POSTER

    Authors

    • Yifei Zhu

      LPP, CNRS, Ecole Polytechnique-UPMC-UPSud-UPSay

    • Svetlana Starikovskaia

      Ecole Polytechnique, France, LPP, CNRS, Ecole Polytechnique-UPMC-UPSud-UPSay, Laboratory of Plasma Physics, Ecole Polytechnique, Paris

    • Natalie Babaeva

      Joint Institute for High Temperatures, RAS, Institute for High Temperatures, Russian Academy of Sciences

    • Mark J. Kushner

      University of Michigan, Electrical Engineering and Computer Science Dept., University of Michigan

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  • The effect of realistic surface coefficients on the electron dynamics and process control in simulations of capacitive RF plasmas

    POSTER

    Authors

    • Manaswi Daksha

      Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • Second harmonic wave generation from a nonlinear combination of volume wave and overdense plasma in negative permeability space

    POSTER

    Authors

    • Akinori Iwai

      Kyoto University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • Analysis of heavy particle processes in low current dc discharge in water vapor

    POSTER

    Authors

    • Jelena Sivos

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia

    • Dragana Maric

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia, Inst of Physics., University of Belgrade, P.O.Box 68, 11080, Belgrade, Serbia

    • Nikola Skoro

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade

    • Gordana Malovic

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade

    • Zoran Petrovic

      University of Belgrade, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Institute of Physics, University of Belgrade, Serbia

    View abstract →

  • Instabilities in Hall $\bf E \times \bf B$ discharges with complex magnetic field configurations.

    POSTER

    Authors

    • A. Smolyakov

      University of Saskatchewan

    • O. Koshkarov

      University of Saskatchewan

    • W Frias

      University of Saskatchewan

    • I. Romadanov

      University of Saskatchewan

    • O. Chapurin

      University of Saskatchewan, University of Saskatchewan, Saskatoon SK, Canada

    • M. Umansky

      Lawrence Livermore National Laboratory, USA

    • Yevgeny Raitses

      Princeton Plasma Phys Lab, Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Lab

    • Igor Kaganovich

      Princeton Plasma Phys Lab, Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, Princeton, NJ 08543, USA, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Laboratory, Princeton NJ, USA

    View abstract →

  • Numerical and analytic results showing the suppression of secondary electron emission from velvet and foam, and a geometric view factor model to guide the development of a surface to suppress SEE.

    POSTER

    Authors

    • Charles Swanson

      Princeton Plasma Physics Laboratory

    • Igor Kaganovich

      Princeton Plasma Phys Lab, Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, Princeton, NJ 08543, USA, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Laboratory, Princeton NJ, USA

    View abstract →

  • Computational study of sheath structure in oxygen containing plasmas at medium pressures.

    POSTER

    Authors

    • Rudolf Hrach

      Faculty of Mathematics and Physics, Charles University, Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University in Prague

    • Stanislav Novak

      Faculty of Science, University J.E. Purkinje

    • Tomas Ibehej

      Faculty of Mathematics and Physics, Charles University, Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University in Prague

    • Vera Hrachova

      Faculty of Mathematics and Physics, Charles University

    View abstract →

  • Optical emission spectroscopy of OH lines in N$_{\mathrm{2}}$ and Ar plasma during the treatments of cotton fabric

    POSTER

    Authors

    • Nikola Skoro

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Tomographic reconstruction for plasma diagnostic

    POSTER

    Authors

    • Christopher Wagner

      IAP, Goethe-Univerity

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • High-resolution TALIF measurements of atomic oxygen: determination of gas temperature and collisional broadening coefficients

    POSTER

    Authors

    • Jean-Paul Booth

      LPP, CNRS-Ecole Polytechnique-UPMC, Ecole Polytechnique, Laboratoire de Physique des Plasmas, Ecole Polytechnique, LPP, CNRS, Ecole Polytechnique-UPMC-UPSud-UPSay

    • Daniil Marinov

      LPP, CNRS-Ecole Polytechnique-UPMC

    • Olivier Guaitella

      LPP, CNRS-Ecole Polytechnique-UPMC

    • Cyril Drag

      LAV, CNRS-ENS Cachan-UPsud, France

    • Richard Engeln

      TU Eindhoven, NL

    • Judith Golda

      Ruhr Universitat Bochum, DE

    • Volker Schultz-von der Gathern

      Ruhr Universitat Bochum, DE

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  • Dual frequency diffuse dielectric barrier discharge in atmospheric-pressure air-like gas mixture for thin film deposition

    POSTER

    Authors

    • Yaoge Liu

      FOM Institute DIFFER

    • Serguei Starostin

      FUJIFILM Manufacturing Europe B.V.

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Hindrik de Vries

      FOM Institute DIFFER

    View abstract →

  • Characterisation of a dielectric barrier surface twin discharge using defined gas mixtures

    POSTER

    Authors

    • Bj\"orn Offerhaus

      Ruhr Univ Bochum (AEPT)

    • Friederike Kogelheide

      Ruhr University Bochum, Ruhr Univ Bochum (BIMAP)

    • Jan-Wilm Lackmann

      Ruhr University Bochum, Ruhr Univ Bochum (AEPT)

    • Nikita Bibinov

      Ruhr Univ Bochum (AEPT)

    • Ryan Smith

      Ruhr Univ Bochum (AEPT), Ruhr Univ Bochum (AEPT, BIMAP)

    • Vera Bracht

      Ruhr Univ Bochum (AEPT), Ruhr Univ Bochum (AEPT, BIMAP)

    • Katharina Stapelmann

      Ruhr University Bochum, Ruhr Univ Bochum (BIMAP)

    • Peter Awakowicz

      Ruhr University Bochum, Ruhr Univ Bochum (AEPT)

    View abstract →

  • Characterization of a dielectric barrier discharge in controlled atmosphere

    POSTER

    Authors

    • Friederike Kogelheide

      Ruhr University Bochum, Ruhr Univ Bochum (BIMAP)

    • Bj\"orn Offerhaus

      Ruhr Univ Bochum (AEPT)

    • Nikita Bibinov

      Ruhr Univ Bochum (AEPT)

    • Vera Bracht

      Ruhr Univ Bochum (AEPT), Ruhr Univ Bochum (AEPT, BIMAP)

    • Ryan Smith

      Ruhr Univ Bochum (AEPT), Ruhr Univ Bochum (AEPT, BIMAP)

    • Jan-Wilm Lackmann

      Ruhr University Bochum, Ruhr Univ Bochum (AEPT)

    • Peter Awakowicz

      Ruhr University Bochum, Ruhr Univ Bochum (AEPT)

    • Katharina Stapelmann

      Ruhr University Bochum, Ruhr Univ Bochum (BIMAP)

    View abstract →

  • Heated probe diagnostic inside of the gas aggregation nanocluster source.

    POSTER

    Authors

    • Anna Kolpakova

      Charles University in Prague, Faculty of Mathematics and Physics, V Holešovickách 2, 180 00 Prague 8

    • Artem Shelemin

      Charles University in Prague, Faculty of Mathematics and Physics, V Holešovickách 2, 180 00 Prague 8

    • Jaroslav Kousal

      Charles University in Prague, Faculty of Mathematics and Physics, V Holešovickách 2, 180 00 Prague 8

    • Pavel Kudrna

      Charles University in Prague, Faculty of Mathematics and Physics, V Holešovickách 2, 180 00 Prague 8

    • Milan Tichy

      Charles University in Prague, Faculty of Mathematics and Physics, V Holešovickách 2, 180 00 Prague 8

    • Hynek Biederman

      Charles University in Prague, Faculty of Mathematics and Physics, V Holešovickách 2, 180 00 Prague 8

    View abstract →

  • Coherent Rayleigh-Brillouin scattering for in situ detection of nanoparticles and large molecules in gas and plasma

    POSTER

    Authors

    • A. Gerakis

      PPPL

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Actinometry of Atomic Fluorine in a Capacitively Coupled Discharge with a mixture of SF$_6$ and O$_2$

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    Authors

    • Sharath Babu

      Dublin City University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Investigation of adaptive signal processing methods for denoised I-V curve of Langmuir probe

    POSTER

    Authors

    • Jung Yeol Lee

      Department of Electrical Engineering, Pusan National University, Busan

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • A self-consistent global model of surface wave discharges with cylindrical or co-axial structures: Ar or O2 fed with continuous or pulse-modulated power input

    ORAL

    Authors

    • Efe Kemaneci

      Institute for Theoretical Electrical Engineering, Ruhr University Bochum

    • Felix Mitschker

      Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum

    • Marcel Rudolph

      Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum

    • Daniel Szeremley

      Institute for Theoretical Electrical Engineering, Ruhr University Bochum

    • Denis Eremin

      Institute for Theoretical Electrical Engineering, Ruhr University Bochum

    • Peter Awakowicz

      Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum

    • Ralf Peter Brinkmann

      Institute for Theoretical Electrical Engineering, Ruhr University Bochum

    View abstract →

  • Monte Carlo simulation of radio-frequency breakdown in oxygen and air

    POSTER

    Authors

    • Marija Savic

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade

    • Dragana Maric

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Inst of Physics, University of Belgrade, P.O. Box 68 11080 Belgrade, Serbia, Inst of Physics., University of Belgrade, P.O.Box 68, 11080, Belgrade, Serbia

    • Marija Radmilovic-Radjenovic

      Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade

    • Zoran Petrovic

      University of Belgrade, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Institute of Physics, University of Belgrade, Serbia

    View abstract →

  • Plasma Chemistry Reduction from ILDM

    POSTER

    Authors

    • Tafizur Rehman

      Department of Applied Physics, Eindhoven university of Technology, Eindhoven, The Netherlands

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Jan Van Dijk

      Department of Applied Physics, Eindhoven university of Technology, Eindhoven, The Netherlands

    View abstract →

  • Heating dominated inception of pulsed discharges.

    POSTER

    Authors

    • Ashutosh Agnihotri

      CWI Amsterdam

    • Willem Hundsdorfer

      CWI Amsterdam and Radboud University, Nijmegen

    • Ute Ebert

      Centrum Wiskunde & Informatica (CWI), The Netherlands; Department of Applied Physics, Eindhoven University of Technology, The Netherlands, CWI Amsterdam and Eindhoven University of Technology, Eindhoven

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  • A Global PLASIMO Model for H2O Chemistry

    POSTER

    Authors

    • Samaneh Tadayon Mousavi

      PhD Candidate, Eindhoven University of Technology, PhD candidate, Eindhoven University of Technology

    • Peter Koelman

      Eindhoven University of Technology, PhD Candidate, Eindhoven University of Technology, PhD candidate, Eindhoven University of Technology

    • Wouter Graef

      Plasma Matters, Plasma Matters B. V.

    • Diana Mihailova

      Plasma Matters B. V.

    • Jan van Dijk

      Eindhoven University of Technology, Assistant Professor, Eindhoven University of Technology

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  • A Robust Compressible Flow Solver for Studies on Solar Fuel Production in Microwave Plasma

    POSTER

    Authors

    • Samaneh Tadayon Mousavi

      PhD Candidate, Eindhoven University of Technology, PhD candidate, Eindhoven University of Technology

    • Peter Koelman

      Eindhoven University of Technology, PhD Candidate, Eindhoven University of Technology, PhD candidate, Eindhoven University of Technology

    • Pieter Willem Groen

      Dutch Institute for Fundamental Energy Research (DIFFER)

    • Jan van Dijk

      Assistant professor, Eindhoven University of Technology

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  • Influence of SF6/O2 inductively coupled plasma parameters on Si etching rates and profiles

    POSTER

    Authors

    • Violeta Georgieva

      Department of Chemistry, Research group PLASMANT, University of Antwerp

    • Stefan Tinck

      Department of Chemistry, Research group PLASMANT, University of Antwerp

    • Annemie Bogaerts

      Antwerp University, University of Antwerp, Plasmant, Plasmant, University of Antwerp, University of Antwerp, Department of Chemistry, Research group PLASMANT, University of Antwerp, PLASMANT University of Antwerp

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  • Fast multipole and space adaptive multiresolution methods for the solution of the Poisson equation

    POSTER

    Authors

    • Petr Bilek

      Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Evaluation of the Aleph PIC Code on Benchmark Simulations.

    POSTER

    Authors

    • Jeremiah Boerner

      Sandia National Laboratories, Thermal/Fluid Component Sciences

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Particle charge distribution in dusty plasmas

    POSTER

    Authors

    • Meenakshi Mamunuru

      Lam Research Corporation

    • Romain Le Picard

      University of Miinesota, University of Minnesota

    • Yukinori Sakiyama

      Lam Research Corporation

    • Steven Girshick

      University of Miinesota, University of Minnesota

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • Two-dimensional PIC/MCC simulation for magnetized capacitively coupled plasmas.

    POSTER

    Authors

    • Hongyu Wang

      School of Physics Science and Technology, Anshan Normal University, Anshan, CN

    • Peng Sun

      School of Physics Science and Technology, Anshan Normal University, Anshan, CN

    • Shali Yang

      Huazhong University of Science and Technology, School of Physics,Wuhan,Hubei,CN, Huazhong University of Science and Technology, School of Physics, Wuhan, Hubei, CN

    • Wei Jiang

      Huazhong University of Science and Technology, School of Physics,Wuhan,Hubei,CN, Huazhong University of Science and Technology, School of Physics, Wuhan, Hubei, CN

    • Xiang Xu

      Dalian University of Technology, School of physics and optoelectronic engineering, Dalian, CN

    View abstract →

  • Effect of weak static magnetic field on electron and ion dynamics in low pressure capacitive discharges

    POSTER

    Authors

    • Sarveshwar Sharma

      Institute for Plasma Research, Gandhinagar, Gujarat

    • Igor Kaganovich

      Princeton Plasma Phys Lab, Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, Princeton, NJ 08543, USA, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Laboratory, Princeton NJ, USA

    • Predhiman Kaw

      Institute for Plasma Research, Gandhinagar, Gujarat

    • Sanjay Mishra

      Institute for Plasma Research, Gandhinagar, Gujarat

    • Alexander Khrabrov

      Princeton Plasma Physics Laboratory, Princeton, NJ 08543, USA, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Laboratory

    • Dmytro Sydorenko

      University of Alberta, Edmonton, Canada

    View abstract →

  • Effect of dual frequency rf power in an inductively coupled plasma

    POSTER

    Authors

    • Ju-Ho Kim

      Department of Electrical Engineering,Hanyang University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Chinwook Chung

      Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering,Hanyang University, Hanyang University

    View abstract →

  • Plasma characteristics in inductively and capacitively coupled hybrid source using single RF power

    POSTER

    Authors

    • Kwan-Yong Kim

      Department of Electrical Engineering Hanyang University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • On the optimal chamber length and electron heating mechanism in low pressure inductive discharges

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    Authors

    • Hyun-Ju Kang

      Department of Electrical Engineering, Hanyang University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Chinwook Chung

      Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering,Hanyang University, Hanyang University

    View abstract →

  • Model reduction for streamer coronas

    POSTER

    Authors

    • Ute Ebert

      CWI Amsterdam and Eindhoven Univ Tech, Netherlands, CWI, Amsterdam and Eindhoven Unviversity of Technology, Centrum Wiskunde & Informatica

    • Jannis Teunissen

      Centrum Wiskunde & Informatica (CWI), Amsterdam, The Netherlands, CWI Amsterdam, Netherlands, KU Leuven, Centre for mathematical Plasma Astrophysics and CWI, Amsterdam

    • Alejandro Luque

      Instituto de Astrofisica de Andalucia (IAA), CSIC, Granada, Spain

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  • High speed deposition of SiO$_{\mathrm{2}}$ film by slot-type microwave CVD system

    POSTER

    Authors

    • Hirotaka Toyoda

      Nagoya University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • Nanoparticle formation and thin film deposition in aniline containing plasmas

    POSTER

    Authors

    • Cedric Pattyn

      GREMI UMR 7344 CNRS&Universite d'Orleans, France

    • Ana Dias

      Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, Portugal, Instituto Superior Técnico, Technical University of Lisbon, Portugal

    • Shahzad Hussain

      GREMI UMR 7344 CNRS&Universite d'Orleans, France

    • Thomas Strunskus

      University of Kiel, Kiel, Germany

    • Ilija Stefanovic

      GREMI UMR 7344 CNRS&Universite d'Orleans, France

    • Chantal Boulmer-Leborgne

      GREMI UMR 7344 CNRS&Universite d'Orleans, France

    • Thomas Lecas

      GREMI UMR 7344 CNRS&Universite d'Orleans, France

    • Eva Kovacevic

      GREMI UMR 7344 CNRS&Universite d'Orleans, France, GREMI UMT 7344 CNRS&Universite d'Orleans, France

    • Johannes Berndt

      GREMI UMR 7344 CNRS&Universite d'Orleans, France, GREMI UMT 7344 CNRS&Universite d'Orleans, France

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  • Underwater plasma discharge and its water treatment applications.

    POSTER

    Authors

    • Suk Hwal Ma

      National Fusion Research Institute

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Design of experiment analysis of CO$_2$ dielectric barrier discharge conditions on CO production

    POSTER

    Authors

    • Markus Becker

      INP Greifswald, 17489 Greifswald, Germany

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Carbon dioxide reduction in low-pressure ICP

    POSTER

    Authors

    • Stanislav Dudin

      V.N. Karazin Kharkiv National University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Valorization of biogas into liquid hydrocarbons in plasma-catalyst reactor

    POSTER

    Authors

    • Mehrdad Nikravech

      LSPM-CNRS, Universit\'e Sorbonne Paris Cit\'e, P13, LSPM-Cnrs, Universit\'e Sorbonne Paris cit\'e Paris13

    • Abdelkader Rahmani

      LSPM-CNRS, Universit\'e Sorbonne Paris Cit\'e, P13, LSPM-Cnrs, Universit\'e Sorbonne Paris cit\'e Paris13

    • Sana Labidi

      LSPM-CNRS, Universit\'e Sorbonne Paris Cit\'e, P13

    • Noiric Saintini

      LSPM-CNRS, Universit\'e Sorbonne Paris Cit\'e, P13

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  • Understanding the vibrational distribution in CO$_{\mathrm{2}}$ microwave plasma for production of carbon neutral fuels, using time resolved in-situ spectroscopy

    POSTER

    Authors

    • Dirk van den Bekerom

      FOM Institute DIFFER

    • Teofil Minea

      FOM Institute DIFFER

    • Nicola Gatti

      FOM Institute DIFFER

    • Floran Peeters

      FOM Institute DIFFER

    • Erwin Zoethout

      FOM Institute DIFFER

    • Tiny Verreycken

      FOM Institute DIFFER

    • Waldo Bongers

      FOM Institute DIFFER

    • Richard van de Sanden

      FOM Institute DIFFER

    • Gerard van Rooij

      FOM Institute DIFFER

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  • Development of atmospheric pressure large area plasma jet for sterilisation and investigation of molecule and plasma interaction

    POSTER

    Authors

    • Kristina Zerbe

      IAP, Goethe-University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Trial of Growth Control of Farm-raised Fish by Plasma-generated Reactive Species

    POSTER

    Authors

    • Hideki Motomura

      Ehime University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Investigation of relationship between plasma gas temperature and reactive species

    POSTER

    Authors

    • Hideyuki Doyama

      FIRST, Tokyo Institute of Technology

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Impact of electric field from a plasma jet on biological targets

    POSTER

    Authors

    • Claire Douat

      Eindhoven University of Technology, PMP, Eindhoven, The Netherlands / GREMI UMR7344CNRS,University of Orleans, France, GREMI UMR7344CNRS University of Orleans, France

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Anti-tumor Effects of Plasma Activated Media and Correlation with Hydrogen Peroxide Concentration.

    POSTER

    Authors

    • Mounir Laroussi

      Old Dominion University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Spatially resolved optical-emission spectroscopy of a radio-frequency driven iodine plasma source

    POSTER

    Authors

    • James Dedrick

      York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, University of York

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • The effect of tailored voltage waveforms on neutral gas heating in a radio-frequency driven electrothermal microthruster

    POSTER

    Authors

    • Scott Doyle

      York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK

    • Andrew Gibson

      Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR

    • Roderick Boswell

      Australian Natl Univ, Space Plasma, Power and Propulsion Laboratory, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 2601, Aus

    • Christine Charles

      Australian Natl Univ, Space Plasma, Power and Propulsion Laboratory, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 2601, Aus, Australian National University, Space Plasma and Plasma Propulsion Laboratory (SP3), RSPE,The Australian National University,Canberra,ACT260

    • James Dedrick

      York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, University of York

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  • Effect of High Z material on the performance of an air-breathing laser ablation thruster

    POSTER

    Authors

    • Kohei Shimamura

      University of Tsukuba

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Generation of composite Au/TiO2 nanoparticles by pulsed laser ablation in aqueous media

    POSTER

    Authors

    • Shota Kawai

      Nagoya Univ

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Spectroscopic studies of plasma in a carbon arc discharge for synthesis of nanomaterials

    POSTER

    Authors

    • Vladislav Vekselman

      Princeton Plasma Physics Laboratory

    • Matthew Feurer

      Seton Hall University

    • Yao-Wen Yeh

      Princeton Plasma Physics Laboratory, Princeton University

    • Brentley Stratton

      Princeton Plasma Physics Laboratory, Princeton Plasma Physics Lab

    • Yevgeny Raitses

      Princeton Plasma Phys Lab, Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Lab

    View abstract →

  • Synthesis of Copper and Nickel Nanoparticles from a Plasma Discharge in Liquid

    POSTER

    Authors

    • Jinyoung Huh

      National Fusion Research Institute

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Surface diffusion of a carbon adatom on charged SWCNT

    POSTER

    Authors

    • Longtao Han

      State Univ of NY- Stony Brook

    • Predrag Krstic

      State Univ of NY- Stony Brook

    • Igor Kaganovich

      Princeton Plasma Phys Lab, Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, Princeton, NJ 08543, USA, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Laboratory, Princeton NJ, USA

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  • Application of bipolar gas discharge for water sterilization from {\it S.aureus} and {\it E-coli}

    POSTER

    Authors

    • Anatoliy Taran

      National Aerospace University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • Experimental study of a very high frequency, 162 MHz, segmented electrode, capacitively coupled plasma discharge

    POSTER

    Authors

    • Nishant Sirse

      School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland, NCPST and School of Physical Sciences, Dublin City Univ, Dublin City University

    • Cleo Harvey

      Dublin City University

    • Cezar Gaman

      Dublin City University

    • Bert Ellingboe

      School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland, Dublin City University, NCPST and School of Physical Sciences, Dublin City Univ, Ireland

    View abstract →

  • Electron and negative ion densities in a CW and pulsed 100 MHz capacitively coupled plasma discharge

    POSTER

    Authors

    • Nishant Sirse

      School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland, NCPST and School of Physical Sciences, Dublin City Univ, Dublin City University

    • Bert Ellingboe

      School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland, Dublin City University, NCPST and School of Physical Sciences, Dublin City Univ, Ireland

    • Takayoshi Tsutsumi

      Nagoya University

    • Sekine Makoto

      Nagoya University

    • Masaru Hori

      Nagoya University

    View abstract →

  • Electron Energy Distribution function in a weakly magnetized expanding helicon plasma discharge

    POSTER

    Authors

    • Nishant Sirse

      School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland, NCPST and School of Physical Sciences, Dublin City Univ, Dublin City University

    • Cleo Harvey

      Dublin City University

    • Cezar Gaman

      Dublin City University

    • Bert Ellingboe

      School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland, Dublin City University, NCPST and School of Physical Sciences, Dublin City Univ, Ireland

    View abstract →

  • Magnetic Field Tailored Annular Hall Thruster with Anode Layer

    POSTER

    Authors

    • Seunghun Lee

      Korea Adv Inst of Sci & Tech

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • Synthesis of N-graphene using microwave plasma-based methods

    ORAL

    Authors

    • Ana Dias

      Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, Portugal, Instituto Superior Técnico, Technical University of Lisbon, Portugal

    • Elena Tatarova

      Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, Portugal

    • Julio Henriques

      Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, Portugal

    • Francisco Dias

      Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, Portugal

    • Edgar Felizardo

      Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, Portugal

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Magnetic field effect on spoke behaviour

    POSTER

    Authors

    • Jaroslav Hnilica

      Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Magnetic field effect on spoke behaviour

    POSTER

    Authors

    • Jaroslav Hnilica

      Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Secondary electron emission in the limit of low incident electron energies

    POSTER

    Authors

    • Aleksandr Mustafaev

      National Mineral-Resource University, St.Petersburg Mining University, Russia

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    View abstract →

  • An analytical model of multi-component single frequency capacitively coupled plasma and experimental validation

    POSTER

    Authors

    • Partha Saikia

      Facultad Fisica, Pontificia Universidad Catolica de Chile, Ave. Vicuña Mackena 4860, Santiago 22, Chile

    • Heman Bhuyan

      Facultad Fisica, Pontificia Universidad Catolica de Chile, Ave. Vicuña Mackena 4860, Santiago 22, Chile

    • Mario Favre

      Facultad Fisica, Pontificia Universidad Catolica de Chile, Ave. Vicuña Mackena 4860, Santiago 22, Chile

    • Edmund Wyndham

      Facultad Fisica, Pontificia Universidad Catolica de Chile, Ave. Vicuña Mackena 4860, Santiago 22, Chile

    • Felipe Veloso

      Facultad Fisica, Pontificia Universidad Catolica de Chile, Ave. Vicuña Mackena 4860, Santiago 22, Chile

    View abstract →

  • 2D probe diagnostics of anisotropic plasmas with no velocity space symmetry

    POSTER

    Authors

    • Aleksandr Mustafaev

      National Mineral-Resource University, St.Petersburg Mining University, Russia

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Photoionization sensors for non-invasive medical diagnostics

    POSTER

    Authors

    • Aleksandr Mustafaev

      National Mineral-Resource University, St.Petersburg Mining University, Russia

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Kristina Khobnya

      St. Petersburg Mining University, Russia

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Modeling of plasma in a hybrid electric propulsion for small satellites.

    POSTER

    Authors

    • Manish Jugroot

      Royal Military College of Canada

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Magnetic Field Tailored Annular Hall Thruster with Anode Layer

    POSTER

    Authors

    • Seunghun Lee

      Korea Adv Inst of Sci & Tech

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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