Plasma Etching

FOCUS · NW2

Presentations

  • Variation in photon-induced interface defects due to transient behavior of pulse modulated inductively coupled plasma

    ORAL

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    Authors

    • Y. Miyoshi

      Sony Semiconductor Solutions Corp.

    • M. Fukasawa

      Sony Semiconductor Solutions Corp.

    • K. Nagahata

      Sony Semiconductor Solutions Corp.

    • T. Tatsumi

      Sony Semiconductor Solutions Corp.

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • K. Ishikawa

      Nagoya Univ.

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

    • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

      Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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  • Tailored Voltage Waveforms in an SF6/O2 discharge: slope asymmetry and its effect on surface nanotexturing of silicon

    ORAL

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    Authors

    • G. Fischer

      Institut Photovoltaique d'Ile-de-France

    • E. Drahi

      Total MS-Energie Nouvelles

    • G. Poulain

      Total MS-Energie Nouvelles

    • B. Bruneau

      LPICM, CNRS, Ecole Polytechnique, Universite Paris-Saclay

    • E. V. Johnson

      LPICM, CNRS, École Polytechnique, Université Paris Saclay, LPICM, CNRS, Ecole Polytechnique, Universite Paris-Saclay

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