Characterization and diagnostics of RF plasmas under manufacturing conditions

Characterization and diagnostics of RF plasmas under manufacturing conditions

GEC17

Conference Overview

Year:: 2017
Series:: GEC
Total Presentations:: 389
Total Sessions:: 44

This academic conference archive contains all presentations, abstracts, and scholarly content from the Characterization and diagnostics of RF plasmas under manufacturing conditions conference. Browse through sessions and individual presentations to explore the research presented.

Events

Linking Academia & Industry

ORAL AM1

Nov. 6, 2017, 9:00 AM – Nov. 6, 2017, 12:00 PM

Room Salon D

6 presentations
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Scientific Paper Writing Workshop

ORAL AM4

Nov. 6, 2017, 9:00 AM – Nov. 6, 2017, 12:30 PM

Room Foster

1 presentation
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Practical Challenges for Industry

ORAL BM1

Nov. 6, 2017, 2:00 PM – Nov. 6, 2017, 5:00 PM

Room Salon D

6 presentations
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Linking Theory & Experiment

ORAL BM2

Nov. 6, 2017, 2:00 PM – Nov. 6, 2017, 5:00 PM

Room Duquesne

6 presentations
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Welcome Reception

ORAL CM1

Nov. 6, 2017, 6:00 PM – Nov. 6, 2017, 8:00 PM

Room Oakmont Junior Ballroom

1 presentation
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Microdischarges I

FOCUS DT1

Nov. 7, 2017, 8:00 AM – Nov. 7, 2017, 9:30 AM

Room Salon D

5 presentations
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Diagnostics I

ORAL DT2

Nov. 7, 2017, 8:00 AM – Nov. 7, 2017, 9:30 AM

Room Duquesne

6 presentations
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Bio-Medical Plasma Chemistry

FOCUS DT3

Nov. 7, 2017, 8:00 AM – Nov. 7, 2017, 9:30 AM

Room Oakmont Junior Ballroom

5 presentations
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Plasmas in Liquids I

FOCUS ET1

Nov. 7, 2017, 10:00 AM – Nov. 7, 2017, 12:00 PM

Room Salon D

7 presentations
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Modeling and Simulation I

FOCUS ET2

Nov. 7, 2017, 10:00 AM – Nov. 7, 2017, 12:00 PM

Room Duquesne

7 presentations
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Plasma Etching for Semiconductor Processing

FOCUS ET3

Nov. 7, 2017, 10:00 AM – Nov. 7, 2017, 12:00 PM

Room Oakmont Junior Ballroom

6 presentations
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Inductively Coupled Plasmas

ORAL FT1

Nov. 7, 2017, 1:30 PM – Nov. 7, 2017, 3:30 PM

Room Salon D

8 presentations
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Plasma Boundaries and Sheaths

FOCUS FT2

Nov. 7, 2017, 1:30 PM – Nov. 7, 2017, 3:30 PM

Room Duquesne

7 presentations
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Heavy Particle Collisions

FOCUS FT3

Nov. 7, 2017, 1:30 PM – Nov. 7, 2017, 3:30 PM

Room Oakmont Junior Ballroom

6 presentations
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Poster Session I

POSTER GT1

Nov. 7, 2017, 4:00 PM – Nov. 7, 2017, 6:00 PM

Room Salon ABC

80 presentations
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Gas Phase Plasma Chemistry I

ORAL JW1

Nov. 8, 2017, 8:00 AM – Nov. 8, 2017, 9:30 AM

Room Salon D

6 presentations
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Diagnostics II

FOCUS JW2

Nov. 8, 2017, 8:00 AM – Nov. 8, 2017, 9:30 AM

Room Duquesne

5 presentations
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Antimatter and Other Processes

FOCUS JW3

Nov. 8, 2017, 8:00 AM – Nov. 8, 2017, 9:30 AM

Room Oakmont Junior Ballroom

4 presentations
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The Will Allis Prize for the Study of Ionized Gases

INVITED KW1

Nov. 8, 2017, 10:00 AM – Nov. 8, 2017, 11:00 AM

Room Salon D

1 presentation
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Business Meeting

ORAL LW1

Nov. 8, 2017, 11:00 AM – Nov. 8, 2017, 12:00 PM

Room Salon D

1 presentation
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Modelling of Propulsion and ExB Plasmas

FOCUS MW3

Nov. 8, 2017, 1:30 PM – Nov. 8, 2017, 3:15 PM

Room Oakmont Junior Ballroom

6 presentations
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Microdischarges II

FOCUS MW1

Nov. 8, 2017, 1:30 PM – Nov. 8, 2017, 3:30 PM

Room Salon D

7 presentations
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Non-equilibrium Kinetics of Low-temperature Plasmas

FOCUS MW2

Nov. 8, 2017, 1:30 PM – Nov. 8, 2017, 3:30 PM

Room Duquesne

7 presentations
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Poster Session II

POSTER NW1

Nov. 8, 2017, 4:00 PM – Nov. 8, 2017, 6:00 PM

Room Salon ABC

89 presentations
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LXCat Discussion

ORAL PW2

Nov. 8, 2017, 7:00 PM – Nov. 8, 2017, 9:00 PM

Room Duquesne

1 presentation
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Magnetically Enhanced Plasmas I

ORAL QR1

Nov. 9, 2017, 8:00 AM – Nov. 9, 2017, 9:30 AM

Room Salon D

6 presentations
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Diagnostics III

FOCUS QR2

Nov. 9, 2017, 8:00 AM – Nov. 9, 2017, 9:30 AM

Room Duquesne

5 presentations
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Collisions with Atoms

FOCUS QR3

Nov. 9, 2017, 8:00 AM – Nov. 9, 2017, 9:30 AM

Room Oakmont Junior Ballroom

4 presentations
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Plasmas at Special Conditions

ORAL RR1

Nov. 9, 2017, 10:00 AM – Nov. 9, 2017, 12:00 PM

Room Salon D

7 presentations
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High Pressure Discharges

ORAL RR2

Nov. 9, 2017, 10:00 AM – Nov. 9, 2017, 12:00 PM

Room Duquesne

8 presentations
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Electron-Molecule Collisions

FOCUS RR3

Nov. 9, 2017, 10:00 AM – Nov. 9, 2017, 12:00 PM

Room Oakmont Junior Ballroom

6 presentations
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Modeling and Simulation II

FOCUS SR1

Nov. 9, 2017, 1:30 PM – Nov. 9, 2017, 3:30 PM

Room Salon D

6 presentations
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Plasmas in Liquids II

FOCUS SR2

Nov. 9, 2017, 1:30 PM – Nov. 9, 2017, 3:30 PM

Room Duquesne

7 presentations
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Capacitively Coupled Plasmas

FOCUS SR3

Nov. 9, 2017, 1:30 PM – Nov. 9, 2017, 3:30 PM

Room Oakmont Junior Ballroom

7 presentations
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Magnetically Enhanced Plasma II

FOCUS TR1

Nov. 9, 2017, 4:00 PM – Nov. 9, 2017, 5:30 PM

Room Salon D

5 presentations
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Dissociation, Recombination, and Attachment

FOCUS TR2

Nov. 9, 2017, 4:00 PM – Nov. 9, 2017, 5:30 PM

Room Duquesne

4 presentations
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Biomedical Plasmas

FOCUS TR3

Nov. 9, 2017, 4:00 PM – Nov. 9, 2017, 5:30 PM

Room Oakmont Junior Ballroom

4 presentations
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Reception and Banquet

ORAL UR1

Nov. 9, 2017, 6:30 PM – Nov. 9, 2017, 9:30 PM

Room Salon ABC

1 presentation
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Surface Treatment and Deposition

ORAL VF3

Nov. 10, 2017, 8:00 AM – Nov. 10, 2017, 8:45 AM

Room Oakmont Junior Ballroom

3 presentations
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Nanoparticles

ORAL VF1

Nov. 10, 2017, 8:00 AM – Nov. 10, 2017, 9:30 AM

Room Salon D

6 presentations
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Gas Phase Plasma Chemistry II

ORAL VF2

Nov. 10, 2017, 8:00 AM – Nov. 10, 2017, 9:30 AM

Room Duquesne

6 presentations
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Plasma-Surface Interactions

ORAL WF2

Nov. 10, 2017, 10:00 AM – Nov. 10, 2017, 11:45 AM

Room Duquesne

7 presentations
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Environmental and Energy Applications

FOCUS WF3

Nov. 10, 2017, 10:00 AM – Nov. 10, 2017, 11:45 AM

Room Oakmont Junior Ballroom

6 presentations
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Reconfigurable and Interacting Plasmas

FOCUS WF1

Nov. 10, 2017, 10:00 AM – Nov. 10, 2017, 12:00 PM

Room Salon D

7 presentations
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