INCA - Inductive Discharge Array

A novel low pressure inductive discharge and stochastic electron heating concept is demonstrated experimentally for the first time~[1]. Here, electrons are collisionlessly heated in a phase-correlated vortex field array, as proposed theoretically in [2]. These periodic vortex fields are produced by an array of $6\times 6$ small inductive planar coils. Easy upscaling to $m^2$-size is possible. Design considerations together with results from various diagnostics are presented. The experimental data show consistently efficient and homogeneous plasma production at pressures below 1 Pa as well as the presence of super energetic electrons. The efficient heating is further demonstrated by the velocity distribution of the electrons. The presented results agree well with theory~[3]. Possible applications for this new plasma source include large area processing and space propulsion.\par \noindent [1] Ph Ahr \textit{et al}, submitted to \textit{Plasma Sources Sci.\ Technol.} (2018), arXiv:1806.02043\par \noindent [2] U Czarnetzki and Kh Tarnev, \textit{Phys.\ Plasmas} \textbf{21} (2014) 123508\par \noindent [3] U Czarnetzki, submitted to \textit{Plasma Sources Sci.\ Technol.} (2018), arXiv:1806.00505