Capacitively Coupled Plasmas II

Presentations

• Electron power absorption in capacitive RF plasmas based on a moment analysis of the Boltzmann equation

  COFFEE_KLATCH · Invited

  Oct. 7, 2020, 2:00 PM – Oct. 7, 2020, 2:30 PM

  Authors

  • Mate Vass

    Ruhr-University Bochum, Germany; Wigner Research Centre for Physics, Hungary

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• Kinetic Modeling of Low-Pressure Multi-Frequency Capacitively Coupled Plasmas

  COFFEE_KLATCH · Invited

  Oct. 7, 2020, 2:30 PM – Oct. 7, 2020, 3:00 PM

  Authors

  • Shahid Rauf

    Applied Materials Inc

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• Fluid Modeling of Capacitively Coupled Radio-frequency Discharge Over a Wide Range of Frequencies

  ORAL

  Oct. 7, 2020, 3:00 PM – Oct. 7, 2020, 3:15 PM

  Authors

  • Han Luo

    Purdue University

  • Andrei Khomenko

    Purdue University

  • Sergey Macheret

    Purdue University

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• Simulation of a capacitively coupled plasma micro-thruster using the particle-in-cell method.

  ORAL

  Oct. 7, 2020, 3:15 PM – Oct. 7, 2020, 3:30 PM

  Authors

  • Michael May

    Princeton Plasma Physics Laboratory

  • Andrew Powis

    Princeton Plasma Physics Laboratory

  • Igor Kaganovich

    Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, Princeton NJ, Plasma Physics Laboratory, Princeton University, Princeton, New Jersey 08543, USA, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Lab

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