Energy efficiency of voltage waveform tailoring for the generation of helium metastable species in RF plasma jets

ORAL

Abstract

Atmospheric pressure capacitively coupled radio frequency discharges operated in He/N2 mixtures and driven by single frequency as well as tailored voltage waveforms are investigated using a reference microplasma COST-jet.  For each case, the dissipated power is measured based on a careful calibration procedure of voltage and current measurements. The results are compared to PIC/MCC simulation results and a very good agreement is found. We demonstrate that Voltage Waveform Tailoring (VWT) - in contrast to the classical single-frequency operation - does not only provide better control of the generation of metastable species (He-I 23S1) but also provides significantly better energy efficiency of such processes.

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Presenters

  • Ihor Korolov

    Ruhr Univ Bochum, Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany, Ruhr-Universität Bochum, Germany, Ruhr University Bochum, Bochum University, Ruhr Univ Bochum, Germany, Ruhr-University Bochum, Ruhr-University Bochum, Germany

Authors

  • Ihor Korolov

    Ruhr Univ Bochum, Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany, Ruhr-Universität Bochum, Germany, Ruhr University Bochum, Bochum University, Ruhr Univ Bochum, Germany, Ruhr-University Bochum, Ruhr-University Bochum, Germany

  • Donkó Zoltán

    Wigner Research Centre for Physics, Hungary

  • Gerrit Hübner

    Ruhr-University Bochum, Germany

  • Yue Liu

    Ruhr University Bochum, Ruhr-University Bochum, Germany

  • Thomas Mussenbrock

    Ruhr University Bochum, Bochum University, Ruhr Univ Bochum, Ruhr-University Bochum, Germany, Ruhr-University Bochum, Ruhr University Bochum, 44780 Bochum, Germany, Ruhr University, Bochum, Germany

  • Julian Schulze

    Ruhr University Bochum, Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany, Ruhr Univ Bochum, Ruhr-University Bochum, Germany; Dalian University of Technology, China, Ruhr University Bochum, Dalian University of Technology, Ruch Univ Bochum, Germany, Ruhr-University Bochum