Plasma Diagnostic: Electrical Diagnostics II

FOCUS · SR52 · ID: 24607





Presentations

  • Recent progress on cutoff probe development for real time processing monitoring

    ORAL · Invited

    Publication: 1. D.W.Kim and S.J. You et al., Plasma Sources Sci. Technol. 28(2019) 015004
    2. S. J. Kim and S. J. You et al., Plasma Sources Sci. Technol. 28(2019) 055014
    3. S. J. Kim and S. J. You et al., AIP Advances 11, (2021) 025241

    Presenters

    • Shin Jae You

      Chungnam Natl Univ, Department of Physics, Chungnam National University

    Authors

    • Shin Jae You

      Chungnam Natl Univ, Department of Physics, Chungnam National University

    • SiJun Kim

      Chungnam Natl Univ

    • daewoong kim

      Korea Institute of Machinery and Materials (KIMM)

    View abstract →

  • Spectra of a geometry improved ideal model of the pMRP

    ORAL

    Presenters

    • Michael Friedrichs

    Authors

    • Michael Friedrichs

    • Jens Oberrath

      South Westphalia University of Applied Sciences, South Westphalia University of Applied Science

    • Dennis Pohle

      Ruhr University Bochum, Institute of Microwave Systems

    • Ilona Rolfes

      Ruhr University Bochum, Institute of Microwave Systems

    • Chunjie Wang

      Ruhr University Bochum, Institute of Theoretical Electrical Engineering

    • Ralf Peter Brinkmann

      Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Institute of Theoretical Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany

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  • Kinetic modeling of the planar Multipole Resonance Probe

    ORAL

    Presenters

    • Chunjie Wang

      Ruhr University Bochum

    Authors

    • Chunjie Wang

      Ruhr University Bochum

    • Michael Friedrichs

      South Westphalia University of Applied Sciences

    • Jens Oberrath

      South Westphalia University of Applied Sciences, South Westphalia University of Applied Science

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum, Ruhr University Bochum

    View abstract →