Plasma Surface Interaction I

Presentations

• Photoemission induced plasma breakdown

  ORAL

  Oct. 3, 2022, 7:00 PM – Oct. 3, 2022, 7:15 PM

  Presenters

  • Brian Z Bentz

    Sandia National Laboratories, Sandia National Laboatory

  Authors

  • Brian Z Bentz

    Sandia National Laboratories, Sandia National Laboatory

  • Kevin Youngman

    Sandia National Laboratories

  • Asif Iqbal

    Michigan State University

  • Yang Zhou

    Michigan State University

  • Peng Zhang

    Michigan State University

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• GEC Student Excellence Award Finalist Presentation - Dynamic surface surrogate model trained on atomistic data of AlN sputter depositions

  ORAL

  Oct. 3, 2022, 7:15 PM – Oct. 3, 2022, 7:30 PM

  Presenters

  • Tobias Gergs

    Ruhr University Bochum

  Authors

  • Tobias Gergs

    Ruhr University Bochum

  • Thomas Mussenbrock

    Ruhr University Bochum

  • Jan Trieschmann

    Kiel University, Christian-Albrechts-Universität zu Kiel, Theoretical Electrical Engineering, Faculty of Engineering, Kiel University

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• Strategies to Enhance Etch Selectivity During Fluorocarbon Plasma-Assisted Atomic Layer Etching of Silicon-Based Dielectrics

  ORAL · Invited

  Oct. 3, 2022, 7:30 PM – Oct. 3, 2022, 8:00 PM

  Presenters

  • Sumit Agarwal

    Colorado School of Mines

  Authors

  • Sumit Agarwal

    Colorado School of Mines

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• Secondary electron emission due to atomic and molecular iodine ion bombardment

  ORAL

  Oct. 3, 2022, 8:00 PM – Oct. 3, 2022, 8:15 PM

  Publication: Derived papers: L. Habl, D. Rafalsky, and T. Lafleur, "Secondary electron emission due to multi-species iodine ion bombardment of different target materials", Journal of Applied Physics 129, 153302 (2021)

  Presenters

  • Trevor Lafleur

    ThrustMe, ThrustMe, Verrières-le-Buisson F-91370, France

  Authors

  • Lui Habl

    ThrustMe, Verrières-le-Buisson F-91370, France

  • Dmytro Rafalskyi

    ThrustMe, Verrières-le-Buisson F-91370, France

  • Trevor Lafleur

    ThrustMe, ThrustMe, Verrières-le-Buisson F-91370, France

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• Evidence of the dominant production mechanism of ammonia in a H₂/N₂plasma

  ORAL

  Oct. 3, 2022, 8:15 PM – Oct. 3, 2022, 8:30 PM

  Publication: Ellis et al., Appl. Phys. Lett. 119, 241601 (2021); https://doi.org/10.1063/5.0072534

  Presenters

  • James Ellis

    1 Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany 2Now at: Oxford Instruments Plasma Technology, Yatton, Bristol, United Kingdom

  Authors

  • James Ellis

    1 Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany 2Now at: Oxford Instruments Plasma Technology, Yatton, Bristol, United Kingdom

  • Daniel Köpp

    Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany

  • Norbert Lang

    Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany

  • Jean-Pierre H van Helden

    Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany

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