Plasma Applications

FOCUS · FT1 · ID: 549993

Presentations

The role of atomic physics in collisional-radiative modeling of tin plasmas for lithography

ORAL · Invited

Oct. 3, 2022, 7:00 PM – Oct. 3, 2022, 7:30 PM
Presenters
- James Colgan
  
  LANL
Authors
- James Colgan
  
  LANL
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Profiling of High-Pressure DC Microdischarge for excimer emission.

ORAL

Oct. 3, 2022, 7:30 PM – Oct. 3, 2022, 7:45 PM
Presenters
- Rumysa Manzoor
  
  Indian Institute of Technology Delhi
Authors
- Rumysa Manzoor
  
  Indian Institute of Technology Delhi
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Bridging the gap between fluid and kinetic plasma simulations for industrial plasma sources

ORAL · Invited

Oct. 3, 2022, 7:45 PM – Oct. 3, 2022, 8:15 PM
Presenters
- Alexandre Likhanskii
  
  Applied Materials Inc
Authors
- Alexandre Likhanskii
  
  Applied Materials Inc
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