Plasma Deposition

Presentations

• Deposition of silicon-based thin films with atmospheric-pressure plasmas

  ORAL · Invited

  Oct. 7, 2022, 12:30 AM – Oct. 7, 2022, 1:00 AM

  Presenters

  • Matteo Gherardi

    University of Bologna

  Authors

  • Matteo Gherardi

    University of Bologna

  • Vittorio Colombo

    University of Bologna

  • Romolo Laurita

    University of Bologna

  • Giulia Laghi

    University of Bologna

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• Process analysis of cracking a-C:H/CNP/a-C:H sandwich films under stress using nanoindentation

  ORAL

  Oct. 7, 2022, 1:00 AM – Oct. 7, 2022, 1:15 AM

  Presenters

  • Shinjiro Ono

    Kyushu University

  Authors

  • Shinjiro Ono

    Kyushu University

  • Takamasa Okumura

    Kyushu University, Kyushu University, Japan

  • Kunihiro Kamataki

    Kyushu Univ, Kyushu University, Kyushu University, Japan

  • Naoto Yamashita

    Kyushu University, Kyushu University, Japan

  • Naho Itagaki

    Kyushu University, Kyushu University, Japan

  • Kazunori Koga

    Kyushu Univ, Kyushu University, Kyushu University, Japan

  • Masaharu Shiratani

    Kyushu University, Kyushu University, Japan

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• Deposition of zinc oxide film using high power impulse magnetron sputtering

  ORAL

  Oct. 7, 2022, 1:15 AM – Oct. 7, 2022, 1:30 AM

  Presenters

  • Katsunori Nagahashi

    Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

  Authors

  • Katsunori Nagahashi

    Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

  • Takayuki Ohta

    Meijo Univ, Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan., Department of Electrical and Electronic Engineering, Meijo University, Japan, Department of Electrical and Electronic Engineering, Meijo University, Japan., Meijo university, Meijo University, Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

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• Sputter epitaxy of Mg-doped ZnO films on sapphire substrates using inverted Stranski-Krastanov mode

  ORAL

  Oct. 7, 2022, 1:30 AM – Oct. 7, 2022, 1:45 AM

  Publication: D. Takahashi, et al., MRS Advances, https://doi.org/10.1557/s43580-022-00234-1

  Presenters

  • Masaharu Shiratani

    Kyushu University, Kyushu University, Japan

  Authors

  • Masaharu Shiratani

    Kyushu University, Kyushu University, Japan

  • Daichi Takahashi

    Kyushu University

  • Naoto Yamashita

    Kyushu University, Kyushu University, Japan

  • Naho Itagaki

    Kyushu University

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• Deposition of Rutile TiO₂ Thin Films Using high power pulsed magnetron sputtering

  ORAL

  Oct. 7, 2022, 1:45 AM – Oct. 7, 2022, 2:00 AM

  Presenters

  • Miyuki Nishimura

    Meijo University

  Authors

  • Miyuki Nishimura

    Meijo University

  • Takayuki Ohta

    Meijo Univ, Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan., Department of Electrical and Electronic Engineering, Meijo University, Japan, Department of Electrical and Electronic Engineering, Meijo University, Japan., Meijo university, Meijo University, Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

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• Next-generation Li-ion battery achieved by the low temperature plasma processes

  ORAL · Invited

  Oct. 7, 2022, 2:00 AM – Oct. 7, 2022, 2:30 AM

  Presenters

  • Giichiro Uchida

    Meijo University

  Authors

  • Giichiro Uchida

    Meijo University

  View abstract →