Magnetically-Enhanced Plasmas: Magnetron

FOCUS · HW4 · ID: 1531236





Presentations

  • Thermodynamic quasi-equilibria in high power magnetron discharges: A generalized Poisson-Boltzmann relation

    ORAL

    Publication: 1. Köhn K., Krüger D., Kemaneci E., Xu L., Eremin D., Brinkmann R.P., Plasma Sources Sci. Technol. 30, 105014 (2021)
    2. Köhn K., Krüger D., Xu L., Eremin D., Brinkmann R.P., Plasma Sources Sci. Technol. 32, 055012 (2021)

    Presenters

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    Authors

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    • Kevin Koehn

      Ruhr Univ Bochum, Ruhr University Bochum

    • Dennis Krueger

      Ruhr Univ Bochum, Ruhr University Bochum

    • Liang Xu

      Soochow University

    • Denis Eremin

      Ruhr Univ Bochum, Ruhr University Bochum

    View abstract →

  • Spatially resolved model of the discharge current characteristics of axisymmetric radio frequency-driven magnetrons

    ORAL

    Presenters

    • Kevin Koehn

      Ruhr Univ Bochum, Ruhr University Bochum

    Authors

    • Kevin Koehn

      Ruhr Univ Bochum, Ruhr University Bochum

    • Lukas Vogelhuber

      Ruhr University Bochum

    • Denis Eremin

      Ruhr Univ Bochum, Ruhr University Bochum

    • Dennis Krueger

      Ruhr Univ Bochum, Ruhr University Bochum

    • Liang Xu

      Soochow University

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    View abstract →

  • Gradient drift instabilities and rotating spokes in direct current and radio frequency driven magnetron discharges

    ORAL · Invited

    Publication: [1] L. Xu, D. Eremin, and R. P. Brinkmann, Plasma Sources Science and Technology 30, 075013 (2021).
    [2] L. Xu, D. Eremin, A. Smolyakov, D. Krüger, K. Köhn, and R. P. Brinkmann, arXiv: 2202.07033 (2022).
    [2] L. Xu, H. M. Sun, D. Eremin, S. Ganta, I. Kaganovich, K. Bera, and S. Rauf, arXiv:2305.15941 (2023).

    Presenters

    • Liang Xu

      Soochow University, China

    Authors

    • Liang Xu

      Soochow University, China

    • Denis Eremin

      Ruhr Univ Bochum, Ruhr University Bochum

    • Andrei Smolyakov

      Univ Saskatchewan

    • Haoming Sun

      École Polytechnique fédérale de Lausanne (EPFL), Swiss Plasma Center (SPC), Switzerland

    • Dennis Krueger

      Ruhr Univ Bochum, Ruhr University Bochum

    • Kevin Koehn

      Ruhr Univ Bochum, Ruhr University Bochum

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    • Sathya S Ganta

      Applied Materials, Inc., Applied Materials Inc, Applied Materials

    • Igor D Kaganovich

      Princeton Plasma Physics Laboratory

    • Kallol Bera

      Applied Materials, Inc., Applied Materials

    • Shahid Rauf

      Applied Materials, Inc., Applied Materials

    View abstract →