Discharge Plasma III
FOCUS · DR4 · ID: 2481007
Presentations
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Uniformity control in multi-electrode capacitive RF plasmas
ORAL · Invited
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Presenters
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Li Wang
Ruhr University Bochum, Ruhr-University Bochum
Authors
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Li Wang
Ruhr University Bochum, Ruhr-University Bochum
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Peter Hartmann
Wigner Research Center for Physics
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Zoltan Donko
Wigner Research Center for Physics, Institute for Solid State Physics and Optics HUN-REN Wigner Research Centre for Physics, Budapest, Hungary, Wigner Research Center
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Yuan-Hong Song
Dalian University of Technology
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Julian Schulze
Ruhr-University Bochum
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On the connection between the self-sputter yield and deposition rate in high power impulse magnetron sputtering
ORAL
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Publication: [1] J. T. Gudmundsson, Plasma Sources Science and Technology, 29(11) (2020) 113001
[2] J. T. Gudmundsson et al., Journal of Vacuum Science and Technology A, 30(3) (2012) 030801
[3] J. T. Gudmundsson et al., Surface and Coatings Technology, 442 (2022) 128189
[4] Swetha Suresh Babu et al., Plasma Sources Science and Technology, 31(6) (2022) 065009
[5] H. Eliasson et al., Plasma Sources Science and Technology, 30(11) (2021) 115017
[6] K. Barynova et al., Plasma Sources Science and Technology, submitted for publicationPresenters
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Jon T Gudmundsson
University of Iceland
Authors
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Jon T Gudmundsson
University of Iceland
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Kateryna Barynova
University of Iceland
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Martin Rudolph
Leibniz Institute of Surface Engineering (IOM)
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Swetha Suresh Babu
University of Iceland
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Joel Fischer
Linkoping University
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Michael A Raadu
KTH Royal Institute of Technology
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Nils Brenning
KTH Royal Institute of Technology
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Daniel Lundin
Linkoping University
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Measuring electron temperature temporal oscillations in an electrodeless thruster using floating harmonic probe techniques
ORAL
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Presenters
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Federico Boni
ONERA, Physics Instrumentation and Space Department, ONERA, Université Paris-Saclay, 91123 Palaiseau, France
Authors
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Federico Boni
ONERA, Physics Instrumentation and Space Department, ONERA, Université Paris-Saclay, 91123 Palaiseau, France
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Victor Désangles
Physics Instrumentation and Space Department, ONERA, Physics Instrumentation and Space Department, ONERA, Université Paris-Saclay, 91123 Palaiseau, France
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Modeling of ECR plasma discharges in hydrogen with an electromagnetic PIC code
ORAL
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Presenters
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Denis Eremin
Ruhr University Bochum
Authors
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Denis Eremin
Ruhr University Bochum
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Efe Kemaneci
ASML
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Luuk Heijmans
ASML
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Andrei M Yakunin
ASML
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Ralf Peter Brinkmann
Ruhr Univ Bochum, Ruhr University Bochum
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Mark van de Kerkhof
ASML
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Electron-beam generated ExB plasmas and their applications: user and host team research projects at Princeton Collaborative Research Facility
ORAL
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Publication: [1] S. G. Walton et al., ECS J. Solid State Sci. Technol. 4 N5033 (2015)
[2] C. Pederson et al., Phys. Rev. Mater. 8, 036201 (2024)
[3] N. S. Chopra et al., Appl. Phys. Lett. 124, 064101 (2024).
[4] H. Sun et al., Phys. Rev. Lett. 129, 125001 (2022)
[5] S. Yatom et al., Plasma Sources Sci. Technol. 32, 115005 (2023)
[6] F. Zhao et al., Carbon, 117, 244 (2021)Presenters
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Yevgeny Raitses
Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory (PPPL)
Authors
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Yevgeny Raitses
Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory (PPPL)
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Shurik Yatom
Princeton Plasma Physics Laboratory
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Nirbhav S Chopra
Princeton Plasma Physics Laboratory
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Santosh Kondeti
Princeton Plasma Physics Laboratory
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Arthur Dogariu
Texas A&M University and Princeton University, Princeton University and Texas A&M University, Princeton University, Texas A&M University College Station
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Igor D Kaganovich
Princeton Plasma Physics Laboratory
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Mapping electron density with laser-collision induced fluorescence in a helium capacitively coupled radio-frequency plasma
ORAL
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Presenters
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Brian Z Bentz
Sandia National Laboratories
Authors
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Brian Z Bentz
Sandia National Laboratories
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Kevin Youngman
Sandia National Laboratories
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Peter Hartmann
Wigner Research Center for Physics
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Aranka Derzsi
Wigner Research Center for Physics
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Zoltan Donko
Wigner Research Center for Physics, Institute for Solid State Physics and Optics HUN-REN Wigner Research Centre for Physics, Budapest, Hungary, Wigner Research Center
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Investigation of Plasma Characteristics in VHF Capacitive Discharges Operated at Extremely Low Pressures and High Voltages (kV Range)
ORAL
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Presenters
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Andrew Tasman Powis
Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, Princeton, USA
Authors
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Sarveshwar Sharma
Institute for Plasma Research
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Andrew Tasman Powis
Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, Princeton, USA
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Igor D Kaganovich
Princeton Plasma Physics Laboratory
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