N and H atoms in non-equilibrium N₂/H₂ ferroelectric barrier discharge

Non-equilibrium low-temperature plasma is a promising technology for distributed and green manufacturing. However, the lack of control and enhancement of electric field and active species are common roadblocks to tuning plasma chemistry and enhancing the reactivity and selectivity. Incorporating ferroelectric materials is a promising technique to address this issue by increasing surface charge. Unfortunately, very few studies focus on the underlying physics of how ferroelectric materials enhance plasma. As such, this work aims to provide physical insights and practical guidance to a variety of plasma-assisted manufacturing.

This study investigates the critical active species, specifically N and H atoms, in a non-equilibrium N₂/H₂ plasma with a ferroelectric barrier. By utilizing advanced femtosecond two-photon absorption laser-induced fluorescence technique, this research aims to achieve high temporal resolution for precise tracking of species populations and their interactions. This study compares the active species and plasma instabilities between ferroelectric barrier discharges and traditional dielectric barrier discharges to identify the specific contributions of ferroelectric barriers to plasma chemistry and kinetics. A deeper understanding of the role of ferroelectric barriers in plasma discharges will enhance the applicability of plasma-assisted processes across various fields.