Modeling & Simulation IV

FOCUS · DW1 · ID: 2482158

Presentations

  • Numerical thermalization timescales in electrostatic particle-in-cell simulations

    ORAL · Invited

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    Publication: S. Jubin, A. T. Powis, W. Villafana, D. Sydorenko, S. Rauf, A. V. Khrabrov, S. Sarwar and I. D. Kaganovich, "Numerical thermalization in 2D PIC simulations: Practical estimates for low-temperature plasma simulations," Phys. Plasmas 31, 023902 (2024). doi: 10.1063/5.0180421

    Presenters

    • Sierra E Jubin

      Princeton University

    Authors

    • Sierra E Jubin

      Princeton University

    View abstract →

  • Computational and experimental investigation of an ICP with RF subrate bias in an industrial etch reactor

    ORAL

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    Presenters

    • Katharina Noesges

      Ruhr University Bochum, 44780 Bochum, Germany, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    Authors

    • Katharina Noesges

      Ruhr University Bochum, 44780 Bochum, Germany, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Jonas Giesekus

      Ruhr-Universität Bochum, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Florian Beckfeld

      Ruhr-University Bochum, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Julian Schulze

      Ruhr University Bochum, Germany, Ruhr University Bochum, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Thomas Mussenbrock

      Ruhr University, Bochum, Germany, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    View abstract →

  • Particle-in-cell modeling of low-pressure radio frequency hollow cathode discharge

    ORAL

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    Presenters

    • Han Luo

      Applied Materials Inc, Applied Materials

    Authors

    • Han Luo

      Applied Materials Inc, Applied Materials

    • Kallol Bera

      Applied Materials, Applied Materials, Inc.

    • Xingyi Shi

      Applied Materials

    • Jan Guttmann

      Ruhr University Bochum

    • Ihor Korolov

      Ruhr University, Bochum, Germany, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany, Ruhr University Bochum

    • Julian Schulze

      Ruhr University Bochum, Germany, Ruhr University Bochum, Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Shahid Rauf

      Applied Materials, Applied Materials, Inc.

    • Jason Kenney

      Applied Materials

    View abstract →

  • Modeling of low-temperature argon plasma in capacitively-coupled glow discharges with a collisional-radiative model

    ORAL

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    Presenters

    • Malamas Tsagkaridis

      The University of Texas at Austin

    Authors

    • Malamas Tsagkaridis

      The University of Texas at Austin

    • Todd Oliver

      University of Texas at Austin, Oden Institute for Computational Engineering and Sciences

    • Dan Fries

      University of Texas at Austin

    • Ruairi O'Connor

      University of Texas at Austin

    • Juan P Barberena-Valencia

      University of Texas at Austin

    • Laxminarayan L Raja

      The University of Texas at Austin

    • Philip L Varghese

      University of Texas at Austin

    • Robert D Moser

      University of Texas at Austin

    View abstract →