Modeling & Simulation IV
FOCUS · DW1 · ID: 2482158
Presentations
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Numerical thermalization timescales in electrostatic particle-in-cell simulations
ORAL · Invited
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Publication: S. Jubin, A. T. Powis, W. Villafana, D. Sydorenko, S. Rauf, A. V. Khrabrov, S. Sarwar and I. D. Kaganovich, "Numerical thermalization in 2D PIC simulations: Practical estimates for low-temperature plasma simulations," Phys. Plasmas 31, 023902 (2024). doi: 10.1063/5.0180421
Presenters
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Sierra E Jubin
- Princeton University
Authors
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Sierra E Jubin
- Princeton University
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Computational and experimental investigation of an ICP with RF subrate bias in an industrial etch reactor
ORAL
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Presenters
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Katharina Noesges
- Ruhr University Bochum, 44780 Bochum, Germany
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
Authors
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Katharina Noesges
- Ruhr University Bochum, 44780 Bochum, Germany
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
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Jonas Giesekus
- Ruhr-Universität Bochum
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
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Florian Beckfeld
- Ruhr-University Bochum
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
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Julian Schulze
- Ruhr University Bochum, Germany
- Ruhr University Bochum
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
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Thomas Mussenbrock
- Ruhr University, Bochum, Germany
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
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Particle-in-cell modeling of low-pressure radio frequency hollow cathode discharge
ORAL
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Presenters
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Han Luo
- Applied Materials Inc
- Applied Materials
Authors
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Han Luo
- Applied Materials Inc
- Applied Materials
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Kallol Bera
- Applied Materials
- Applied Materials, Inc.
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Xingyi Shi
- Applied Materials
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Jan Guttmann
- Ruhr University Bochum
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Ihor Korolov
- Ruhr University, Bochum, Germany
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
- Ruhr University Bochum
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Julian Schulze
- Ruhr University Bochum, Germany
- Ruhr University Bochum
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
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Shahid Rauf
- Applied Materials
- Applied Materials, Inc.
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Jason Kenney
- Applied Materials
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Modeling of low-temperature argon plasma in capacitively-coupled glow discharges with a collisional-radiative model
ORAL
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Presenters
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Malamas Tsagkaridis
- The University of Texas at Austin
Authors
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Malamas Tsagkaridis
- The University of Texas at Austin
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Todd Oliver
- University of Texas at Austin
- Oden Institute for Computational Engineering and Sciences
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Dan Fries
- University of Texas at Austin
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Ruairi O'Connor
- University of Texas at Austin
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Juan P Barberena-Valencia
- University of Texas at Austin
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Laxminarayan L Raja
- The University of Texas at Austin
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Philip L Varghese
- University of Texas at Austin
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Robert D Moser
- University of Texas at Austin
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Drift-Diffusion models for RF-CCPs at intermediate pressure: estimating transport coefficients
ORAL
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Publication: [1] Boeuf J P and Pitchford L C Physical Review E 1995 51 1376-139
Presenters
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Shu Zhang
- Lpp, Ecole Polytechnique
Authors
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Shu Zhang
- Lpp, Ecole Polytechnique
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Alejandro Alvarez Laguna
- CNRS - Laboratoire de Physique des Plasmas
- LPP-CNRS
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Jean-Paul Booth
- LPP-CNRS
- The French National Centre for Scientific Research (CNRS)
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