Looking for Plasma Diagnostic Techniques in Unusual Places

ORAL · Invited

Abstract

The inspiration for scientific and technological advances can sometimes come from observations having nothing to do with the subject of interest. I will give some personal examples of seemingly unrelated observations that inspired several diagnostics methods for gaining deeper insights into low temperature plasmas, and in particular plasma-surface interactions related to etching of microelectronics materials.

Presenters

  • Vincent Donnelly

    University of Houston

Authors

  • Vincent Donnelly

    University of Houston