Looking for Plasma Diagnostic Techniques in Unusual Places
ORAL · Invited
Abstract
The inspiration for scientific and technological advances can sometimes come from observations having nothing to do with the subject of interest. I will give some personal examples of seemingly unrelated observations that inspired several diagnostics methods for gaining deeper insights into low temperature plasmas, and in particular plasma-surface interactions related to etching of microelectronics materials.
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Presenters
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Vincent Donnelly
University of Houston
Authors
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Vincent Donnelly
University of Houston