Workshop II: Data-driven Plasma Science

Presentations

• Physics-informed neural networks for calculation and measurement of fundamental data on electron transport in plasmas

  ORAL · Invited

  Sept. 30, 2024, 12:30 PM – Sept. 30, 2024, 1:00 PM

  Presenters

  • Satoru Kawaguchi

    Muroran Institute of Technology

  Authors

  • Satoru Kawaguchi

    Muroran Institute of Technology

  • Kazuhiro Takahashi

    Muroran Institute of Technology

  • Kohki Satoh

    Muroran Institute of Technology

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• Data-Enabled Control of Low-Temperature Plasma Interactions with Complex Interfaces

  ORAL · Invited

  Sept. 30, 2024, 1:00 PM – Sept. 30, 2024, 1:30 PM

  Presenters

  • Ali Mesbah

    University of California, Berkeley

  Authors

  • Ali Mesbah

    University of California, Berkeley

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• Coffee Break

  COFFEE_KLATCH

  Sept. 30, 2024, 1:30 PM – Sept. 30, 2024, 2:00 PM

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• Neural Network Model of Radio-Frequency Plasmas

  ORAL · Invited

  Sept. 30, 2024, 2:00 PM – Sept. 30, 2024, 2:30 PM

  Presenters

  • Kallol Bera

    Applied Materials, Applied Materials, Inc.

  Authors

  • Kallol Bera

    Applied Materials, Applied Materials, Inc.

  • Abhishek Verma

    Applied Materials

  • Sathya Swaroop Ganta

    Applied Materials Inc

  • Shahid Rauf

    Applied Materials, Applied Materials, Inc.

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• Human-Machine Collaboration in Semiconductor Process Development

  ORAL · Invited

  Sept. 30, 2024, 2:30 PM – Sept. 30, 2024, 3:00 PM

  Publication: Kanarik, et al. Nature 616, 707–711 (2023)

  Presenters

  • Richard Alan Gottscho

    Lam Research

  Authors

  • Richard Alan Gottscho

    Lam Research

  • Keren Kanarik

    Lam Research

  • Wojciech T Osowiecki

    Lam Research

  • Yu Lu

    Lam Research

  • Dipongkar Talukder

    Lam Research

  • Niklas Roschewsky

    Lam Research

  • Sae Na Park

    Lam Research

  • Matt Kamon

    Lam Research

  • David Michael Fried

    Lam Research

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• Lunch

  COFFEE_KLATCH

  Sept. 30, 2024, 3:00 PM – Sept. 30, 2024, 4:00 PM

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• Recent developments in the provision of atomic and molecular data for plasma modelling

  ORAL · Invited

  Sept. 30, 2024, 4:00 PM – Sept. 30, 2024, 4:30 PM

  Presenters

  • Jonathan Tennyson

    University College London

  Authors

  • Jonathan Tennyson

    University College London

  • Gregory Armstrong

    Quantemol Ltd

  • Kateryna Lemishko

    Quantemol Ltd

  • Anna Nelson

    Quantemol Ltd

  • Sebastian Mohr

    Quantemol Ltd

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• Physics-informed low-temperature plasma simulation: frameworks and applications

  ORAL · Invited

  Sept. 30, 2024, 4:30 PM – Sept. 30, 2024, 5:00 PM

  Publication: [1] L. Zhong, Q. Gu and B. Wu, Computer Physics Communications 257, 107496 (2020).
  [2] L. Zhong, B. Wu and Y. Wang, Physics of Fluids 34 (8), 087116 (2022).
  [3] L. Zhong, B. Wu and Y. Wang, Journal of Physics D: Applied Physics 56 (7), 074006 (2023).
  [4] Y. Wang and L. Zhong, Journal of Computational Physics 496, 112603 (2024).

  Presenters

  • Linlin Zhong

    Southeast University

  Authors

  • Linlin Zhong

    Southeast University

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• Data-driven plasma science-based plasma etching process design in OLED and Semiconductor mass productions referring to PI-VM

  ORAL · Invited

  Sept. 30, 2024, 5:00 PM – Sept. 30, 2024, 5:30 PM

  Publication: [1] S. Park, J.Seong, G.-H. Kim et al., J. Kor. Phys. Soc., 80 (2022) 8.
  [2] S. Park, J.Seong, Y.Park, Y.Noh, H.Lee, N.Bae, K.-B.Roh, R.Seo, B.Song, and G.-H.Kim, Plasma.Phys.Cont.Fusion. 66 (2024) 2.
  

  Presenters

  • Seolhye Park

    Samsung Display Co.,Ltd.

  Authors

  • Seolhye Park

    Samsung Display Co.,Ltd.

  • Jaegu Seong

    Samsung Display Co.,Ltd.

  • Yoona Park

    Samsung Display Co.,Ltd.

  • Haneul Lee

    Seoul National University

  • Namjae Bae

    Seoul National University

  • Gon-Ho Kim

    Seoul National University

  View abstract →

• Plasma process optimization using machine learning

  ORAL · Invited

  Sept. 30, 2024, 5:30 PM – Sept. 30, 2024, 6:00 PM

  Publication: Tsuyoshi Moriya, Yusuke Suzuki, Hitoshi Yonemichi and Hironori Moki, J. Phys. D: Appl. Phys. 56 (2023) 354002

  Presenters

  • Tsuyoshi Moriya

    Tokyo Electron Technology Solutions Ltd.

  Authors

  • Tsuyoshi Moriya

    Tokyo Electron Technology Solutions Ltd.

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• Coffee Break

  COFFEE_KLATCH

  Sept. 30, 2024, 6:00 PM – Sept. 30, 2024, 6:30 PM

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• Demonstrating Data-Driven Capabilities for use in Plasma Physics

  ORAL · Invited

  Sept. 30, 2024, 6:30 PM – Sept. 30, 2024, 7:00 PM

  Presenters

  • Christine Greve

    AFRL

  Authors

  • Christine Greve

    AFRL

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• A Study for Solving the Boltzmann Equation with Variable E/N using Physics-informed Neural Networks

  ORAL · Invited

  Sept. 30, 2024, 7:00 PM – Sept. 30, 2024, 7:30 PM

  Publication: [1] Kawaguchi S, Takahashi K, Ohkama K, and Satoh K 2020 Plasma Sources Sci. Technol. 29 025021
  [2] Kawaguchi S and Murakami T 2022 Jpn. J. Appl. Phys. 61 086002
  [3] Kawaguchi S, Takahashi K, Satoh K, and Itoh H 2016 Jpn. J. Appl. Phys. 55 07LD03
  [4] Kawaguchi S, Takahashi K, and Satoh K 2021 Plasma Sources Sci. Technol. 30 035010

  Presenters

  • Kim Jinseok

    Tokyo Electron Technology Solutions Limited

  Authors

  • Kim Jinseok

    Tokyo Electron Technology Solutions Limited

  • Kazuki Denpoh

    Tokyo Electron Technology Solutions Limited

  • Satoru Kawaguchi

    Muroran Institute of Technology

  • Kohki Satoh

    Muroran Institute of Technology

  • Masaaki Matsukuma

    Tokyo Electron Technology Solutions Limited

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• An Introduction to Version 3 of the LXCat Plasma Input Data Platform

  ORAL · Invited

  Sept. 30, 2024, 7:30 PM – Sept. 30, 2024, 8:00 PM

  Presenters

  • Jan Van Dijk

    Eindhoven University of Technology

  Authors

  • Jan Van Dijk

    Eindhoven University of Technology

  • Daan J Boer

    Eindhoven University of Technology

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• Open Discussion

  COFFEE_KLATCH

  Sept. 30, 2024, 8:00 PM – Sept. 30, 2024, 8:30 PM

  View abstract →