Plasma Etching I

Presentations

• Physical and chemical effects in low temperature etching of memory devices

  ORAL · Invited

  Oct. 1, 2024, 1:00 PM – Oct. 1, 2024, 1:30 PM

  Presenters

  • Thorsten Lill

    Lam Research

  Authors

  • Thorsten Lill

    Lam Research

  • Youn-Jin Oh

    Lam Research

  • Mark Wilcoxson

    Lam Research

  • Harmeet Singh

    Lam Research, Lam Research Corporation

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• Digital Twins for Plasma-Surface Interactions in Atomic Layer Etching

  ORAL

  Oct. 1, 2024, 1:30 PM – Oct. 1, 2024, 1:45 PM

  Presenters

  • David Barry Graves

    Chemical & Biological Engineering Princeton University, Princeton University

  Authors

  • David Barry Graves

    Chemical & Biological Engineering Princeton University, Princeton University

  • Joseph R Vella

    TEL Technology Center, America

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• Effect of Secondary Electron Emission on Surface Charging during Plasma Etching for Microelectronics Fabrication

  ORAL

  Oct. 1, 2024, 1:45 PM – Oct. 1, 2024, 2:00 PM

  Presenters

  • Chenyao Huang

    University of Michigan

  Authors

  • Chenyao Huang

    University of Michigan

  • Steven C Shannon

    North Carolina State University

  • Mark Jay Kushner

    University of Michigan

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• Process Control of Plasma Etching of SiN, SiO₂ and poly-Si films via Enhanced Fragmentation of CHF₂CF₃ and CF₃CH₃, CHF₂CH₃

  ORAL

  Oct. 1, 2024, 2:00 PM – Oct. 1, 2024, 2:15 PM

  Presenters

  • Trung Nguyen Tran

    Nagoya University

  Authors

  • Trung Nguyen Tran

    Nagoya University

  • Toshio Hayashi

    Nagoya University

  • Hiroshi Iwayama

    UVSOR Sychrotron Facility

  • Shih-Nan Hsiao

    Nagoya university

  • Makoto Sekine

    Nagoya University

  • Masaru Hori

    Center for Low-temperature Plasma Sciences, Nagoya University, Japan, Nagoya University

  • Kenji Ishikawa

    Center for Low-temperature Plasma Sciences, Nagoya University, Japan, Nagoya University, Japan

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• Characterization and Effects of Fluorine-Containing Ionic Liquid Ion Beams on Metal-Coated Substrates

  ORAL

  Oct. 1, 2024, 2:15 PM – Oct. 1, 2024, 2:30 PM

  Presenters

  • Nazli Turan

    University of Southampton

  Authors

  • Nazli Turan

    University of Southampton

  • Charlie Ryan

    University of Southampton

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• Extraction and Transport of Positive and Negative Ions in Plasma Etch Applications

  ORAL

  Oct. 1, 2024, 2:30 PM – Oct. 1, 2024, 2:45 PM

  Presenters

  • Sergey Voronin

    TEL Technology Center, TEL TECHNOLOGY CENTER, AMERICA, LLC

  Authors

  • Sergey Voronin

    TEL Technology Center, TEL TECHNOLOGY CENTER, AMERICA, LLC

  • Nicholas Smieszek

    TEL TECHNOLOGY CENTER, AMERICA, LLC

  • Carl Lynwood Smith

    TEL TECHNOLOGY CENTER, AMERICA, LLC

  • Qi Wang

    TEL TECHNOLOGY CENTER, AMERICA, LLC

  • Akiteru Ko

    TEL TECHNOLOGY CENTER, AMERICA, LLC

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