Chips Making Chips: The Role of Plasma Modeling, Virtualization and Machine Learning in Advanced Semiconductor Development

ORAL · Invited

Abstract

Technology, and semiconductor technology in particular, has been advancing at a rapid and accelerating pace since the invention of the transistor over 75 years ago. We’ve now reached the point that “virtual” manufacturing equipment, powered by advanced chip technology and artificial intelligence, is producing the next generation of computer chips. This has created a virtuous cycle of innovation, where computer chips and machine learning are helping to produce new, more powerful chips, but even faster and better than before.

In this talk, we will discuss how semiconductor production is being aided by “virtual twins” and review the challenges and opportunities available. We will examine the use of virtual twins in the semiconductor industry and the role and use cases of plasma modeling in virtual fabs. In addition, we will discuss how process modeling and virtual chambers are being used together in semiconductor design and manufacturing. Finally, we will review a case study that demonstrates how human intelligence and experience can be complemented by machine learning to further accelerate the spiral of innovation in computer chip technology.

Presenters

  • David Michael Fried

    Lam Research

Authors

  • David Michael Fried

    Lam Research