Modeling & Simulation V

FOCUS · FR1 · ID: 2481971





Presentations

  • An experimental and modelling investigation on the application of a structured showerhead to improve the process uniformity in plasma enhanced chemical vapour deposition

    ORAL

    Publication: Improving the spatial uniformity of plasma-assisted deposition of silicon dioxide using a structured showerhead electrode (planned paper)

    Presenters

    • Montu Prafulbhai Bhuva

      Oxford Instruments Plasma Technology, Severn Beach, Bristol BS35 4GG, UK

    Authors

    • Montu Prafulbhai Bhuva

      Oxford Instruments Plasma Technology, Severn Beach, Bristol BS35 4GG, UK

    • Gregory Daly

      Oxford Instruments Plasma Technology, Severn Beach, Bristol BS35 4GG, UK

    • Geoff Hassall

      Oxford Instruments Plasma Technology, Severn Beach, Bristol BS35 4GG, UK

    • James Timothy Ellis

      Oxford Instruments Plasma Technology, Severn Beach, Bristol BS35 4GG, UK

    • Erik Wagenaars

      York Plasma Institute, University of York, UK, York Plasma Institute, University of York, University of York

    • James P Dedrick

      York Plasma Institute, University of York, UK, York Plasma Institute, University of York

    View abstract →

  • Electron transport in a Hall thruster from an axial-azimuthal PIC code including interaction with radial walls.

    ORAL

    Publication: Previous related work

    - G. Cuerva-Lazaro, E. Bello-Benıtez,A. Marin-Cebrian, E. Ahedo,`Towards self-consistent simulation of radial effects on an axial PIC model of the Hall discharge`, IEPC-2024-699, Presented at the 38th International Electric Propulsion Conference, Toulouse, France, June 23-28, 2024
    - E. Bello-Benítez, A. Marín-Cebrián, E. Ahedo, 'Effect of injection conditions on the non-linear behavior of the ECDI and related
    turbulent transport', arXiv preprint 2405.08761, 2024, arxiv.org

    Presenters

    • EDUARDO ( AHEDO

      UNIVERSIDAD CARLOS III DE MADRID, Universidad Carlos III de Madrid

    Authors

    • EDUARDO ( AHEDO

      UNIVERSIDAD CARLOS III DE MADRID, Universidad Carlos III de Madrid

    • Guillermo Cuerva Lazaro

      UC3M

    • Alberto Marin-Cebrian

      UC3M

    • Enrique Bello-Benítez

      UC3M

    View abstract →

  • Self-consistent computation of the optical emission spectrum of low-pressure argon CCPs

    ORAL · Invited

    Publication: Z. Donko, Ts. V. Tsankov, P. Hartmann, F. J. Arellano, U. Czarnetzki, S. Hamaguchi: "Self-consistent calculation of the optical emission spectrum of an argon capacitively coupled plasma based on the coupling of particle simulation with a collisional-radiative model", J. Phys. D: Appl. Phys., provisionally accepted

    Presenters

    • Zoltan Donko

      Wigner Research Center for Physics, Institute for Solid State Physics and Optics HUN-REN Wigner Research Centre for Physics, Budapest, Hungary, Wigner Research Center

    Authors

    • Zoltan Donko

      Wigner Research Center for Physics, Institute for Solid State Physics and Optics HUN-REN Wigner Research Centre for Physics, Budapest, Hungary, Wigner Research Center

    View abstract →