Simulation Study of Inductively Coupled Plasma Discharge in Air Background

In order to study the physical characteristics of ICP discharge under air background, the ICP-related discharge parameters under different discharge power and other conditions were simulated in COMSOL, and the changes of plasma discharge parameters during discharge were obtained and analyzed. The distribution of molar concentration of N2 and O2 and the variation of charged particles at fixed frequency are also studied. The results show that the plasma electron density increases significantly with the increase of discharge power and cavity pressure. At high frequency, the heating efficiency decreases, resulting in the decrease of plasma electron density, electron temperature and macroscopic gas temperature. As a electronegative gas, O2 is more likely to participate in the reaction to form oxidation state particles such as O2- and O3 during the discharge process, resulting in more significant energy loss.