Discharge Plasma I

Presentations

• Radio-frequency plasma ignition study in a plasma enhanced chemical vapor deposition chamber

  ORAL

  Oct. 1, 2024, 1:00 PM – Oct. 1, 2024, 1:15 PM

  Presenters

  • Edward P Hammond

    Applied Materials, Inc.

  Authors

  • Edward P Hammond

    Applied Materials, Inc.

  • Yuhua Xiao

    Applied Materials

  • Rajeshkumar Putti

    Applied Materials

  View abstract →

• The quasineutrality assumption in the ionization region of a magnetron in the presence of electron number perturbations

  ORAL

  Oct. 1, 2024, 1:15 PM – Oct. 1, 2024, 1:30 PM

  Presenters

  • Kevin Koehn

    Ruhr Univ Bochum, Ruhr University Bochum

  Authors

  • Kevin Koehn

    Ruhr Univ Bochum, Ruhr University Bochum

  • Lukas L Vogelhuber

    Bochum University, Ruhr University Bochum

  • Dennis Krueger

    Ruhr Univ Bochum, Ruhr University Bochum

  • Denis Eremin

    Ruhr University Bochum

  • Ralf Peter Brinkmann

    Ruhr Univ Bochum, Ruhr University Bochum

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• Hybrid Plasma Modeling of Capacitively-Coupled O2 Plasma at Intermediate Pressures and Comparison with Experiments

  ORAL

  Oct. 1, 2024, 1:30 PM – Oct. 1, 2024, 1:45 PM

  Presenters

  • Nakul Nuwal

    Applied Materials

  Authors

  • Nakul Nuwal

    Applied Materials

  • Rupali Sahu

    Applied Materials

  • Kallol Bera

    Applied Materials, Applied Materials, Inc.

  • Abhishek Verma

    Applied Materials

  • Shahid Rauf

    Applied Materials, Applied Materials, Inc.

  • Shu Zhang

    LPP-CNRS

  • Garrett Curley

    LPP-CNRS, Ecole Polytechnque, Palaiseau, France

  • Jean-Paul Booth

    LPP-CNRS, The French National Centre for Scientific Research (CNRS)

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• Simulation and Characterization of Capacitively-Coupled Argon Plasma at Intermediate Pressure

  ORAL

  Oct. 1, 2024, 1:45 PM – Oct. 1, 2024, 2:00 PM

  Presenters

  • Rupali Sahu

    Applied Materials

  Authors

  • Rupali Sahu

    Applied Materials

  • Nakul Nuwal

    Applied Materials

  • Kallol Bera

    Applied Materials, Applied Materials, Inc.

  • Shahid Rauf

    Applied Materials, Applied Materials, Inc.

  • Jean-Paul Booth

    LPP-CNRS, The French National Centre for Scientific Research (CNRS)

  • Shu Zhang

    LPP-CNRS

  • Garrett Curley

    LPP-CNRS, Ecole Polytechnque, Palaiseau, France

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• The Inductively Coupled Array Discharge (INCA)

  ORAL · Invited

  Oct. 1, 2024, 2:00 PM – Oct. 1, 2024, 2:30 PM

  Publication: [1] Ph. Ahr, T.V. Tsankov, J. Kuhfeld, U. Czarnetzki, Philipp Ahr et al 2018 Plasma Sources Sci. Technol. 27 105010.
  [2] U. Czarnetzki and Kh. Tarnev, Physics of Plasmas 21, 123508 (2014).
  [3] Uwe Czarnetzki 2018 Plasma Sources Sci. Technol. 27 105011
  [4] Christian Lütke Stetzkamp et al 2021 J. Phys. D: Appl. Phys. 54 385204
  [5] Philipp Ahr, Dissertation RUB 2018
  [6] Christian Lütke Stetzkamp Dissertation RUB 2024
  

  Presenters

  • Uwe Czarnetzki

    Ruhr-University Bochum, Faculty of Physics and Astronomy, Ruhr University Bochum

  Authors

  • Uwe Czarnetzki

    Ruhr-University Bochum, Faculty of Physics and Astronomy, Ruhr University Bochum

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• Revealing spatiotemporal dynamics of electrons in planar magnetron plasmas

  ORAL

  Oct. 1, 2024, 2:30 PM – Oct. 1, 2024, 2:45 PM

  Presenters

  • Sedina Tsikata

    Georgia Institute of Technology

  Authors

  • Sedina Tsikata

    Georgia Institute of Technology

  • Thibault Dubois

    ThrustMe

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• Electron Dynamics in Partially Magnetized Plasmas

  ORAL

  Oct. 1, 2024, 2:45 PM – Oct. 1, 2024, 3:00 PM

  Presenters

  • Lukas L Vogelhuber

    Bochum University, Ruhr University Bochum

  Authors

  • Lukas L Vogelhuber

    Bochum University, Ruhr University Bochum

  • Kevin Koehn

    Ruhr Univ Bochum, Ruhr University Bochum

  • Denis Eremin

    Ruhr University Bochum

  • Dennis Krueger

    Ruhr Univ Bochum, Ruhr University Bochum

  • Ralf Peter Brinkmann

    Ruhr Univ Bochum, Ruhr University Bochum

  View abstract →