Inductively Coupled Plasmas

FOCUS · GT3 · ID: 3430027

Presentations

  • ORAL

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    Presenters

    • Shahid Rauf

      • Applied Materials, Inc.

    Authors

    • Shahid Rauf

      • Applied Materials, Inc.

    • Jason Kenney

      • Applied Materials, Inc.

    • Tianhong Wang

      • Applied Materials, Inc.

    • Dmytro Sydorenko

      • Department of Physics, University of Alberta, AB, Canada

    • Alexander V. Khrabrov

      • Princeton Plasma Physics Laboratory (PPPL)

    • Igor D Kaganovich

      • Princeton Plasma Physics Laboratory (PPPL)

    View abstract →

  • ORAL · Invited

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    Presenters

    • Shaun Smith

      • Lam Research Corporation

    Authors

    • Shaun Smith

      • Lam Research Corporation

    • Brett Scheiner

      • Lam Research

    • Benjamin Yee

      • Lam Research Corporation

    • Amanda M Lietz

      • North Carolina State University

    • Omar Alsaeed

      • North Carolina State University

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  • ORAL

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    Publication: planned papers: Controlling the spatial distribution of the electron beam by the spliced grid in inductively coupled plasma.

    Presenters

    • Jaehwi Kim

      • Hanyang University

    Authors

    • Jaehwi Kim

      • Hanyang University

    • jiwon jung

      • Hanyang University

    • Min-Seok Kim

      • Hanyang University

    • Chin-Wook Chung

      • Department of electrical engineering, Hanyang University, Seoul, Korea1
      • Hanyang University

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  • ORAL

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    Publication: submitted manuscripts: Xiandi Li, Zhaoyu Chen, Zili Chen, Yu Wang, Minglun Tian, Hongyu Wang, Zhipeng Chen, Wei Jiang, Julian Schulze, Ya Zhang

    Presenters

    • Xiandi Li

      • School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

    Authors

    • Xiandi Li

      • School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Zhaoyu Chen

      • School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Zili Chen

      • School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Yu Wang

      • School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China
      • Huazhong University of Science and Technology

    • Xiandi Li

      • School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Hongyu Wang

      • School of Physics Science and Technology, Anshan Normal University, Anshan, 114007, China

    • Zhipeng Chen

      • School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Li Wang

      • Ruhr University Bochum
      • Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Wei Jiang

      • School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Julian Schulze

      • Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Ya Zhang

      • Department of Mathematics, Wuhan University of Technology, Wuhan, 430070, China
      • Wuhan University of Technology
      • Department of Physics, Wuhan University of Technology, Wuhan, 430070, China

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  • ORAL

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    Publication: Dmytro Sydorenko, Igor D. Kaganovich, Alexander V. Khrabrov, Stephane A. Ethier, Jin Chen, Salomon Janhunen, "Improved algorithm for a two-dimensional Darwin particle-in-cell code", Phys. Plasmas 32, 043904 (2025).

    Presenters

    • Igor D Kaganovich

      • Princeton Plasma Physics Laboratory (PPPL)

    Authors

    • Dmytro Sydorenko

      • Department of Physics, University of Alberta, AB, Canada

    • Igor D Kaganovich

      • Princeton Plasma Physics Laboratory (PPPL)

    • Alexander V. Khrabrov

      • Princeton Plasma Physics Laboratory (PPPL)

    • Stephane Ethier

      • Princeton Plasma Physics Laboratory, Princeton, USA

    • Jin Chen

      • Princeton Plasma Physics Laboratory

    • Salomon Janhunen

      • Los Alamos National Laboratory

    View abstract →

  • ORAL

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    Publication: Simulations of E-H Mode Transition in Inductively Coupled Plasmas via 2D Particle-In-Cell/Monte Carlo Collision method

    Presenters

    • Zhaoyu Chen

      • School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    Authors

    • Zhaoyu Chen

      • School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Zili Chen

      • School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Yu Wang

      • School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China
      • Huazhong University of Science and Technology

    • Wei Jiang

      • School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Yonghua Ding

      • School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Donghui Xia

      • School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Ya Zhang

      • Department of Mathematics, Wuhan University of Technology, Wuhan, 430070, China
      • Wuhan University of Technology
      • Department of Physics, Wuhan University of Technology, Wuhan, 430070, China

    View abstract →