Resonant Operation of Nanoelectromechanical Systems in a Viscous Fluid

Devrez Karabacak; Kamil L. Ekinci

Resonant Operation of Nanoelectromechanical Systems in a Viscous Fluid

ORAL

Abstract

Up to date, most work on nanoelectromechanical systems (NEMS) has been done in high vacuum. Yet, many applications may require fluidic NEMS operation. Here, we present measurements of the quality ($Q)$ factor and resonance frequency in nanomechanical doubly-clamped beam resonators as a function of surrounding gas pressure --- from high vacuum to atmospheric conditions. Atmospheric $Q$s obtained are $\sim $10$^{2}$. The experimental results also suggest that viscous effects become less severe in high frequency devices.

March 16, 2006, 9:12 AM – March 16, 2006, 9:24 AM

Authors

Devrez Karabacak

Dept. of Aerospace and Mechanical Eng., Boston University
Kamil L. Ekinci

Dept. of Aerospace and Mechanical Eng., Boston University, Department of Aerospace and Mechanical Engineering, Boston University