Effect of N to In flux ratio on the InN surface morphologies grown on single crystal ZnO (000$\overline 1 )$ substrate by plasma-assisted molecular beam epitaxy

POSTER

Abstract

The surface morphology of InN epitaxial films grown on ZnO (000$\overline 1 )$ substrate by plasma-assisted molecular beam epitaxy has beam investigated. We found that the evolution of InN surface morphology was sensitive to the N/In flux ratio. With N/In flux ratio decreasing, the growth mode was changing from 3D to 2D growth. In addition, we found that In$_{2}$O$_{3}$ layer was formed at the interface between InN and ZnO when the N/In flux ratio was lower than 32 by the observation of XRD and TEM.

Authors

  • Cheng-Hung Shih

    Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, R.O.C.

  • Ikai Lo

    Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China, Center for Nanoscience and Nanotechnology and Dept of Physics, National Sun Yat-Sen University, Kaohsiung, Taiwan, Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, R.O.C., Department of Physics, National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C., Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, Republic of China

  • Wen-Yuan Pang

    Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China, Center for Nanoscience and Nanotechnology and Dept of Physics, National Sun Yat-Sen University, Kaohsiung, Taiwan, Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, R.O.C., Department of Physics, National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C., Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, Republic of China

  • Shih-Hung Chuang

    Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, R.O.C.

  • Chia-Hsuan Hu

    Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, R.O.C.

  • Chia-Ho Hsieh

    Institute of Material Science and Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan,, Institute of Material Science and Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan.