Micromolding fabrication of SiC SPM probes

ORAL

Abstract

Micromolding techniques have been employed to form SiC cantilevers on silicon substrates for use in SPM. A pre-ceramic polymer is molded into the desired probe shape and then converted to SiC via pyrolisys. Due to SiC's much higher softening temperature compared to silicon, this approach may enable AFM scanning of very high temperature surfaces. Additionally, the use of polymer molding techniques can lead to the creation of cantilever cross sections with unconventional geometries allowing for higher resonant frequencies while maintaining a length $>$ 100$\mu$m.

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Authors

  • Chiayun Wu

    • University of Massachusetts Lowell Dept. of Physics

  • Lian Dai

    • University of Massachusetts Lowell Dept of Electrical and Computer Engineering

  • Carlos Hernandez

    • University of Massachusetts Lowell Dept of Electrical and Computer Engineering

  • Daniel Schmidt

    • University of Massachusetts Lowell Dept of Plastics Engineering

  • Joel Therrien

    • University of Massachusetts Lowell
    • Dept. of Electrical \& Computer Engineering, Univ. of Mass Lowell
    • U. Massachusetts Lowell
    • University of Massachusetts Lowell Dept of Electrical and Computer Engineering