Ultrathin single crystal diamond nanomechanical resonators

We report the fabrication and operation of ultrathin ($<$ 100 nm) high-frequency single crystal diamond nanomechanical resonators. Suspended diamond dome structures were created in a microwave hydrogen plasma which undercuts a sacrificial damage layer formed by medium energy (150-180 keV) ion implantation at a high fluence ($>$1$\times$10$^{16}$ ions/cm$^{2}$ ). Under high vacuum conditions we measure resonant frequencies between 70 MHz and 550 MHz with quality factors ranging from $\sim$ 750 to over 1000 using an optical technique. Mechanical, thermal and optical properties in combination with chemical inertness and bio-compatibility of single crystal diamond make these high-frequency, low-mass dome resonators suitable for sensing applications.