Synthesis of Ag$_{2}$O Films using RF Magnetron Sputtering

Silver oxide (Ag$_{2}$O) thin films were successfully grown using reactive RF magnetron sputtering onto SiO$_{2}$ and Al$_{2}$O$_{3}$ substrates at room temperature. Synthesis of these films was achieved in a gaseous mixture of oxygen and argon which was 40{\%} oxygen. X-Ray diffraction tests yielded numerous peak intensities at angles correlating directly to Ag$_{2}$O. Deposition rates were shown to be a significantly greater on Al$_{2}$O$_{3}$ in comparison to SiO$_{2}$. Understanding this difference is a point of future investigations. ASTM D3359 adhesion tests as well as four terminal conductivity tests were also performed on the films and will be reported.