Continued study and modeling of compact, RF-driven plasma source

We will be reporting on the theoretical studies and further development of a compact RF-driven gas discharge plasma source [1] operating at a wide range of pressures. Positive results have been obtained using a variety of mono- and diatomic atmospheric gases, including helium and nitrogen. Successful source operation has also been achieved with magnetic field arrangements utilizing chassis of permanent rare-earth magnets. The results of more sophisticated experimental investigations will be discussed, along with associated theoretical studies and numerical modeling of source operation and plasma dynamics. [1]~A.Hyde, R.Kamieneski, O.Batishchev, Development of a compact atmospheric pressure plasma source, Bulletin APS, \textbf{57} (12) 324, 54th APS DPP, Providence, Oct 29 - Nov 2, 2012.