An in situ GISAXS study of BCP thin films during annealing in selective solvent vapor: Solvent removal effects in films of different initial thickness
ORAL
Abstract
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Authors
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Ilja Gunkel
Lawrence Berkeley Natl Lab
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Xiaodan Gu
University of Massachusetts Amherst, Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720, USA
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Alexander Hexemer
Lawrence Berkeley National Laboratory, Lawrence Berkeley Natl Lab, Lawrence Berkeley National Lab
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Thomas Russell
University of Massachusetts Amherst, Univ of Mass - Amherst, University of Massachusetts at Amherst, Department of Polymer Science and Engineering, University of Massachusetts Amherst, Polymer Science and Engineering, University of Massachusetts - Amherst. Advanced Institute for Materials Research, Tohoku University, UMASS-Amherst, Department of Polymer Science and Engineering, University of Massachusetts - Amherst