Bio-Inspired Micromechanical Directional Acoustic Sensor

Conventional directional sound sensors employ an array of spatially separated microphones and the direction is determined using arrival times and amplitudes. In nature, insects such as the Ormia ochracea fly can determine the direction of sound using a hearing organ much smaller than the wavelength of sound it detects. The fly's eardrums are mechanically coupled, only separated by about 1 mm, and have remarkable directional sensitivity. A micromechanical sensor based on the fly's hearing system was designed and fabricated on a silicon on insulator (SOI) substrate using MEMS technology. The sensor consists of two 1 mm$^{\mathrm{2}}$ wings connected using a bridge and to the substrate using two torsional legs. The dimensions of the sensor and material stiffness determine the frequency response of the sensor. The vibration of the wings in response to incident sound at the bending resonance was measured using a laser vibrometer and found to be about 1 $\mu $m/Pa. The electronic response of the sensor to sound was measured using integrated comb finger capacitors and found to be about 25 V/Pa. The fabricated sensors showed good directional sensitivity. In this talk, the design, fabrication and characteristics of the directional sound sensor will be described.