Optimization of Aluminum-doped Zinc Oxide as a Transparent Conducting Oxide

ORAL

Abstract

Transparent conducting oxide (TCO) thin films are extensively used in optoelectronics. This study focuses on the optimization of aluminum-doped zinc oxide (AZO) as a TCO for photovoltaic applications. AZO thin films were fabricated using RF magnetron sputtering in the argon environment and characterized using UV-Vis spectroscopy, X-ray diffraction, Hall measurements and four-point probe. The effects of substrate temperature, deposition pressure, and power on the properties of AZO were studied. Using a deposition pressure of 10 mTorr, deposition temperature of 250 $^{\circ}$ C, and 60 W RF power, optical transmittance of up to 90{\%} in the visible range was achieved along with a resistivity in the order of 10$^{\mathrm{-4}} \quad \Omega $ cm. The measured properties are among the most optimal reported for AZO thin films.

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Authors

  • Tristan Cabrera

    Department of Chemistry, Physics and Astronomy, Georgia College & State University,

  • Stephen Hood

    Department of Chemistry, Physics and Astronomy, Georgia College & State University,

  • Hasitha Mahabaduge

    Georgia College & State University, Department of Chemistry, Physics and Astronomy, Georgia College & State University, Department of Chemistry, Physics and Astronomy, Georgia College & State University,