Thermal Conductivity of SiC Thin Films

ORAL

Abstract

Non-equilibrium molecular dynamics (NEMD) simulations are carried out to study thermal conductivity of SiC thin films as a function of film thickness over a wide range of temperatures between 300 and 1100 K. Film thickness is varied from 1.308 nm to 20.2nm and we find that the thermal conductivity increases linearly with the film thickness, reaching a plateau when the film thickness is about 20 nm. To a lesser extent, the length of SiC sample has the same effect on thermal conductivity as the film thickness. Temperature variation has a negligible effect on thermal conductivity of SiC.

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Authors

  • Nitish Baradwaj

    CACS Mork Family Department of Chemical Engineering and Material Science

  • Priya Vashishta

    Univ of Southern California, CACS Mork Family Department of Chemical Engineering and Material Science, Department of Physics, University of Southern California, University of Southern California, CACS, Dept. of Physics & Astronomy, Dept. of Chemical Engineering & Materials Science, Dept. of Computer Science, University of Southern California, CACS, Depts. of Physics & Astronomy, Computer Science, and Chemical Engg. & Material Science, USC, CACS, Department of Physics and Astronomy, Department of Chemical Engineering and Materials Science, Collaboratory of Advanced Computing and Simulations Department of Physics and Astronomy,University of Southern California, CACS, Depts. of Physics & Astronomy, Computer Science, and Chemical Engg. and Material Science, USC

  • Aiichiro Nakano

    Univ of Southern California, CACS Mork Family Department of Chemical Engineering and Material Science, Department of Physics, University of Southern California, University of Southern California, CACS, Dept. of Physics & Astronomy, Dept. of Chemical Engineering & Materials Science, Dept. of Computer Science, University of Southern California, CACS, Department of Physics and Astronomy, Department of Chemical Engineering and Materials Science, Collaboratory of Advanced Computing and Simulations Department of Physics and Astronomy,University of Southern California

  • Rajiv Kalia

    Univ of Southern California, CACS Mork Family Department of Chemical Engineering and Material Science, Department of Physics, University of Southern California, University of Southern California, CACS, Dept. of Physics & Astronomy, Dept. of Chemical Engineering & Materials Science, Dept. of Computer Science, University of Southern California, CACS, Department of Physics and Astronomy, Department of Chemical Engineering and Materials Science, Collaboratory of Advanced Computing and Simulations Department of Physics and Astronomy,University of Southern California