Fabrication of Circuit QED Quantum Processors, Part 2: Advanced Semiconductor Manufacturing Perspectives

ORAL

Abstract

Experimental quantum computing is rapidly approaching the integration of sufficient numbers of quantum bits for interesting applications, but many challenges still remain. These challenges include: realization of an extensible design for large array scale up, sufficient material process control, and discovery of integration schemes compatible with industrial 300 mm fabrication. We present recent developments in extensible circuits with vertical delivery. Toward the goal of developing a high-volume manufacturing process, we will present recent results on a new Josephson junction process that is compatible with current tooling. We will then present the improvements in NbTiN material uniformity that typical 300 mm fabrication tooling can provide. While initial results on few-qubit systems are encouraging, advanced processing control is expected to deliver the improvements in qubit uniformity, coherence time, and control required for larger systems.

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Authors

  • D.J. Michalak

    Intel, USA

  • Alessandro Bruno

    QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands, QuTech and Kavli Institute of Nanoscience, Delft University of Technology, The Netherlands, Qutech Advanced Research Center, Delft University of Technology,

  • R. Caudillo

    Intel, USA

  • A.A. Elsherbini

    Intel, USA

  • J.A. Falcon

    Intel, USA

  • Y.S. Nam

    Intel, USA

  • S. Poletto

    QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands

  • J. Roberts

    Intel, USA

  • N.K. Thomas

    Intel, USA

  • Z.R. Yoscovits

    Intel, USA

  • Leonardo DiCarlo

    QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands, QuTech and Kavli Institute of Nanoscience, Delft University of Technology, The Netherlands, QuTech and the Kavli Institute of Nanoscience, Delft University of Technology, Delft, The Netherlands, QuTech and Kavli Institute of Nanoscience, Delft University of Technology and Intel Corporation, QuTech and Kavli Institute of Nanoscience, Delft University of Technology, Delft, The Netherlands, QuTech and Kavli Institute of Nanoscience, Delft University of Technology

  • J.S. Clarke

    Intel, USA, Intel Corporation, USA