Characterization of superinductors fabricated by a reactive evaporation of TiN

A superinductance is a circuit element whose broadband microwave impedance reaches the scale of resistance quantum h/4e\textasciicircum 2 \textasciitilde 6.5kOhm. Here we report an approach of fabricating such circuit elements by a reactive e-beam evaporation of TiN. We use deposition pressure and film thickness to tune TiN film close to a superconductor-insulator transition. Our films have kinetic inductance orders of magnitude higher than the geometric one with the critical temperature being above \textasciitilde 2K. Material analysis revealed that the enhanced kinetic inductance is linked to oxygen incorporation. We present DC and microwave characterization of TiN fabricated using our new method combined with a lift-off process.