Bidirectional Folding with Nanoscale Sheets for Autonomous Micro-Origami

ORAL

Abstract

We present micron sized self-folding devices that consist of nanometer-thin metal oxide bilayers, built with conventional semiconductor fabrication methods. A bending response originating from strain differentials within these bilayer stacks is used as the fold actuation mechanism. This strain differential induced bending is controlled by ion exchange reactions in our nanoscale sheets, which can produce radii of curvature at the order of 10 um within seconds. By lithographically patterning these sheets, we localize the bending and create microscale devices that can sense chemical changes in their environment and respond by changing configurations according to prescribed mountain-valley fold patterns. Finally, we show that our fabrication approach offers a range of chemical, electrical and biological functions as well as a path to sequential folding through the programming of stacks.

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Presenters

  • Baris Bircan

    Physics, Cornell University, Cornell University

Authors

  • Baris Bircan

    Physics, Cornell University, Cornell University

  • Marc Miskin

    Laboratory of Atomic and Solid State Physics, Cornell University, Physics, Cornell University, Cornell University

  • Kyle Dorsey

    Physics, Cornell University, Cornell University

  • Paul McEuen

    Laboratory of Atomic and Solid State Physics, Cornell University, Cornell Univ, Physics, Cornell University, Cornell University

  • Itai Cohen

    Laboratory of Atomic and Solid State Physics, Cornell University, Physics, Cornell University, Cornell University, Department of Physics, Cornell University, Cornell Univ