Room Temperature Characterization of MEMS Devices: Effects of Nearby Solid Boundary

Micro-electro-mechanical-systems (MEMS) are common devices used in consumer technologies and scientific research. MEMS devices are implemented to study quantum fluids by analyzing their mechanical resonance when submersed in fluid. Fundamental equations that describe these devices provide significant information, allowing for quantitative analysis of the oscillators’ resonance. In this study, the effects of damping on the harmonic oscillators are reviewed. Comparisons are made between MEMS devices with and without a substrate. These comparisons are made by varying the pressure of N2 gas and examining the resulting resonance frequencies. Examination of the results suggests that a damped harmonic oscillator without a close boundary experiences a changing rate of damping with pressure and that an oscillator with a close boundary experiences a linear relationship between damping and pressure when submersed in a classical fluid.