Ultra-high Temperature Annealing Effects on Graphene Nano-electromechanical Resonators

In this study, we investigate the ultra-high temperature annealing effects on resonance behaviour of graphene resonators. The graphene resonators were fabricated with a suspended ribbon-shaped graphene and characterized by Raman spectroscopy during the ultra-high temperature annealing process up to the temperature exceeding 2000 K induced by Joule heating. We also demonstrate more than 10-fold enhancement in the mass resolution of clean graphene resonators after the ultra-high temperature annealing process. The mass sensing performance and reliability of the clean graphene resonators were evaluated by observing the change in resonance behaviour after controlled deposition of chromium. Even though the resonance measurement was performed at low vacuum and room temperature conditions, the clean graphene resonator exhibited the minimum detectable mass of 0.41 ag.