In-situ quantum transport measurement system in the milliKelvin range

We will present the design, development and performance of an ultra-high vacuum (UHV) in-situ quantum transport measurement facility operating at a base temperature at the milliKelvin range in magnetic field up to 14 Tesla. The system is capable of in-situ bottom sample exchange with single-axle sample rotation for tilted field measurement. Multiple species of ions, atoms and molecules can be controllably absorbed on or implanted into the sample surface during a single experiment on a single device. The system also includes a complete set of UHV chambers and an inertial gas filled glove box for sample preparation, device fabrication, room temperature sample measurement and doping, as well as the transport of the removable sample stage within the system. To show how the equipment functions, we will demonstrate the evolution of Shubnikov–de Haas oscillation, quantum Hall states and the apparent Berry phase of graphene as a function of different types of impurities, absorbed on the sample during the transport measurement at low temperature.