Quantitative Analysis of Surface Losses in Coplanar Waveguide Resonators, Part 1: Materials and Fabrication

ORAL

Abstract

Two-level systems (TLS) at metal-substrate, metal-air, and substrate-air interfaces are a significant contributor to loss in superconducting resonators probed at the single-photon limit. The choice of fabrication methods for different combinations of superconducting material and substrate affects the TLS density at these interfaces. In this talk, we discuss the process development of high quality factor resonators (Qi >1M) for aluminum, titanium nitride, and niobium, and how both anisotropic and isotropic etching facilitates device geometries designed to focus TLS participation on specific interfaces. Material-specific fabrication challenges are addressed to enable a comparison of surface losses between materials or for a specific fabrication process. Lastly, we report progress on applying this understanding to superconducting qubit devices.

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Presenters

  • Alexander Melville

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT

Authors

  • Alexander Melville

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT

  • Philip Krantz

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT, MIT

  • Wayne Woods

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT

  • Rabindra Das

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT

  • Evan Golden

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT

  • Corey Stull

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT

  • Vlad Bolkhovsky

    MIT Lincoln Laboratory, MIT Lincoln Lab

  • Danielle Braje

    MIT Lincoln Laboratory, MIT Lincoln Lab

  • David Hover

    MIT Lincoln Laboratory, MIT Lincoln Lab

  • David Kim

    MIT Lincoln Laboratory, MIT Lincoln Lab, Lincoln Laboratory, Massachusetts Institute of Technology, Massachusetts Inst of Tech-MIT, Lincoln Laboratory, Massachusetts Inst of Tech-MIT

  • Xhovalin Miloshi

    MIT Lincoln Laboratory, MIT Lincoln Lab

  • Danna Rosenberg

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT, Lincoln Laboratory, Massachusetts Inst of Tech-MIT

  • Arjan Sevi

    MIT Lincoln Laboratory, MIT Lincoln Lab

  • Jonilyn Yoder

    MIT Lincoln Laboratory, MIT Lincoln Lab, Lincoln Laboratory, Massachusetts Institute of Technology, Massachusetts Inst of Tech-MIT, Lincoln Laboratory, Massachusetts Inst of Tech-MIT

  • Eric Dauler

    MIT Lincoln Laboratory, MIT Lincoln Lab

  • William Oliver

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Institute of Technology & MIT Lincoln Laboratory, Department of Physics, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts Institute of Technology, Massachusetts Inst of Tech-MIT, Department of Physics, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts Inst of Tech-MIT, MIT, Lincoln Laboratory, Research Laboratory of Electronics, and Department of Physics, Massachusetts Institute of Technology, Department of Physics, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts institute of Technology