Microfluidic Arrays Using Through-Holes in Printed-Wiring Board for High Throughput Nanopore Sensing

Solid-state nanopore is expected as a long-read and low cost DNA sequencer. Integration and parallel sequencing of the nanopores are effective to enhance the analytical throughput. However, the integrated structure tends to be complicated, because each channel requires both fluidic access and electrical access individually. Also, the leakage current between adjacent channels must be sufficiently smaller than ionic current through a nanopore (target value is 10 pA at 0.1 V). In this study, to simplify the structure, we examined applying through-holes and interconnects of a printed-wiring board (PWD) to vertical fluidic access and electric access respectively. Also, we formed a polyimide pattern on the PWD by photolithography as an isolation layer between adjacent channels. As a result, a microfluidic device with a pitch of 0.7 mm and 400 arrays was successfully fabricated.