Hybrid Integration of Solid-state Quantum Dots on a Silicon-on-Insulator Photonic Chip

Efficient coupling of single photon sources with integrated photonic devices is required for complex quantum photonic systems. Solid-state quantum dots generate on-demand bright single photons, while Silicon-on-Insulator (SOI) photonic circuits can manipulate photons efficiently in a compact foot print. Therefore, combining these two platforms can make complex integrated quantum photonic devices possible. We demonstrate hybrid integration of solid-state quantum dots to SOI photonic devices. We transfer InP nanobeams containing telecom-emitting InAs quantum dots on SOI photonic devices using our pick-and-place technique with nanoscale precision. We couple the telecom wavelength photons from the quantum dots to the silicon waveguide and perform Hanbury-Brown and Twiss measurements on a waveguide beamsplitter. This approach could facilitate integration of pre-characterized III-V quantum dots into large-scale photonic structures that enable complex devices composed of many emitters and photons.