Advanced Nanolithography and Machine Learning

FOCUS · A23





Presentations

  • Automation of Atom-Scale Device Patterning using Machine Learning

    ORAL

    Presenters

    • Jeremiah Croshaw

      University of Alberta, Physics, University of Alberta

    Authors

    • Jeremiah Croshaw

      University of Alberta, Physics, University of Alberta

    • Mohammad Rashidi

      University of Alberta, Physics, University of Alberta

    • Kieran Mastel

      Physics, University of Alberta

    • Marcus Tamura

      Physics, University of Alberta

    • Hedieh Hosseinzadeh

      Quantum Silicon

    • Robert A Wolkow

      University of Alberta, Physics, University of Alberta

    View abstract →

  • Reduced Damage Electron Microscopy with Conditional Sample Re-illumination

    ORAL

    Presenters

    • Akshay Agarwal

      Electrical Engineering and Computer Science, Massachusetts Institute of Technology

    Authors

    • Akshay Agarwal

      Electrical Engineering and Computer Science, Massachusetts Institute of Technology

    • Yuri van Staaden

      Technische Universiteit Delft

    • Vivek Goyal

      Electrical and Computer Engineering, Boston Univeristy

    • Karl K Berggren

      Massachusetts Institute of Technology, Electrical Engineering and Computer Science, Massachusetts Institute of Technology

    View abstract →

  • In situ observation of Sb<sub>2</sub>S<sub>3</sub> single crystal formation in glass by micro x-ray diffraction

    ORAL

    Presenters

    • Courtney Au-yeung

      Physics, Lehigh University

    Authors

    • Courtney Au-yeung

      Physics, Lehigh University

    • Camelia Stan

      Lawrence Berkeley National Laboratory

    • Nobumichi Tamura

      Lawrence Berkeley National Laboratory

    • Himanshu Jain

      Materials Science and Engineering, Lehigh University

    • Volkmar R G Dierolf

      Lehigh University, Physics, Lehigh University

    View abstract →

  • Characterization of stress induced by Si<sub>1-x</sub>Ge<sub>x</sub> in the active epitaxial film on a SOI substrate via Scanning Surface PhotoVoltage Microscopy.

    ORAL

    Presenters

    • James Slinkman

      RF Technology Development, IBM Microelectronics (retired)

    Authors

    • James Slinkman

      RF Technology Development, IBM Microelectronics (retired)

    • Daminda Dahanayaka

      SPM Laboratory, Globalfoundries

    • Philip Kaszuba

      SPM Laboratory, Globalfoundries

    • Leon Moszkowicz

      SPM Laboratory, Globalfoundries

    • Randall Wells

      SPM Laboratory, Globalfoundries

    • Lloyd Bumm

      Homer L Dodge Department of Physics and Astronomy, University of Oklahoma, Homer L. Dodge Department of Physics & Astronomy, University of Oklahoma, Dept. of Physics & Astronomy, University of Oklahoma

    View abstract →

  • 2-beam action spectroscopy for probing multiphoton absorption processes in semiconductors

    ORAL

    Presenters

    • Nikolaos Liaros

      University of Maryland, College Park

    Authors

    • Nikolaos Liaros

      University of Maryland, College Park

    • Daniel Jovinelli

      University of Maryland, College Park

    • John T Fourkas

      University of Maryland, College Park, Department of Chemistry, University of Maryland,College Park, Department of Chemistry and Biochemistry, University of Maryland-College Park

    View abstract →

  • Development of in-situ RF-enabled high-brightness femtosecond electron microscopy for complex material research

    ORAL

    Presenters

    • Shuaishuai Sun

      Department of Physics and Astronomy, Michigan state university

    Authors

    • Shuaishuai Sun

      Department of Physics and Astronomy, Michigan state university

    • Xiaoyi Sun

      Department of Physics and Astronomy, Michigan state university

    • Daniel Bartles

      Department of Physics and Astronomy, Michigan state university

    • Elliot D Wozniak

      Department of Physics and Astronomy, Michigan state university

    • Joseph Williams

      Michigan State Univ, Department of Physics and Astronomy, Michigan state university

    • Faran Zhou

      Michigan State Univ, Department of Physics and Astronomy, Michigan state university

    • Nelson Sepulveda

      Department of Electrical and Computer Engineering, Michigan state university

    • Chong-yu Ruan

      Michigan State Univ, Department of Physics and Astronomy, Michigan state university

    View abstract →