Design of Multi-chip Module with High Impedance Microwave Resonators for cQED Experiments with Si/SiGe Quantum Dots

ORAL

Abstract

Recent work coupling semiconductor qubits to resonators has shown that the use of high kinetic inductance resonators aids in the achievement of strong coupling [1]. We present the design of a multichip module consisting of a Si/SiGe quantum dot die bump-bonded to a TiN superconducting resonator die. This process allows for separate optimization of each circuit component. To increase the resonator impedance, we use TiN which allows for increased kinetic inductance in the superconducting film. Using finite element simulation of the 3D structure and experimentally extracted inductances we target a nominal design impedance of 250-400 ohms for a 100 nm thick film within constraints of the resonator fabrication.
[1] Samkharadze et al., Science 359, 1123 (2018).

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Presenters

  • Nathan Holman

    Department of Physics, University of Wisconsin-Madison, University of Wisconsin - Madison

Authors

  • Nathan Holman

    Department of Physics, University of Wisconsin-Madison, University of Wisconsin - Madison

  • Danna Rosenberg

    MIT Lincoln Laboratory, Massachusetts Institute of Technology

  • Jonilyn Yoder

    MIT Lincoln Laboratory

  • William D. Oliver

    MIT Lincoln Laboratory

  • Matthew A Beck

    Univ of Wiconsin, Madison, Physics, University of Wisconsin-Madison, University of Wisconsin - Madison

  • Robert F McDermott

    University of Wisconsin - Madison, Univ of Wiconsin, Madison, Physics, University of Wisconsin-Madison, University of Wisconsin-Madison

  • Mark G Friesen

    Department of Physics, University of Wisconsin-Madison, University of Wisconsin-Madison, University of Wisconsin - Madison

  • Susan Coppersmith

    Department of Physics, University of Wisconsin-Madison, University of Wisconsin-Madison, University of Wisconsin - Madison

  • Mark Alan Eriksson

    Department of Physics, University of Wisconsin-Madison, University of Wisconsin-Madison, University of Wisconsin - Madison