Fabrication and characterization of nanoscale devices using Local anodic oxidation technique

Graphene is one of the most promising materials as a flexible transparent electrode because of its high transparency and ultrahigh carrier mobility. Up to now, there are a number of methods to pattern graphene for application as electrodes. A commonly used patterning method is a combination of lithography and plasma etching, which causes undesired graphene defects during the etching process. Attempts to develop a patterning method that can simplify the fabrication process with minimal degradation is still a challenge.
Here, we applied an electrochemical process based on Atomic force microscopy (AFM), Local anodic oxidation (LAO) technique, to define graphene electrodes with minimized graphene defect by eliminating the etching process. In addition, it is easy to manufacture a short channel device because the AFM tip has a nanometer order radius.
This technique paves the way for the fabrication of organic-based devices where it is difficult to fabricate with short channels.