Generating Strain in 2D Materials using Microelectromechanical Systems

2D materials are unique in that many of their material properties, such as doping and band-gap, are dynamically tunable. Strain engineering is a promising way to access and tune their electronic properties. We integrate 2D materials with MEMS technology which offers tremendous control over the strain field and is readily compatible with modern electronics. We have previously achieved success in straining MoS₂ to 1.3% using MEMS [1]. Here we report on the use of electrothermal MEMS actuators to uniaxially strain monolayer graphene, as confirmed through micro-Raman spectroscopy. This was achieved through the development of gold micro-riveting to anchor the 2D material in place. We also examine two terminal electrical transport through MEMS-strained graphene. The application of controlled strain using MEMS therefore allows for the investigation of electrical and mechanical interplay in strained 2D materials, opening the door to the development of strain-based 2D electronics.

[1] J. Christopher et. al., " Monolayer MoS₂ Strained to 1.3% with a Microelectromechanical System," arXiv: 1803.02787 [cond-mat.mtrl-sci]