X-ray Optics Fabrication Using Unorthodox Approaches

X-ray microscopes are unique tools for studying buried features of biological and magnetic systems with high spatiotemporal resolution. The limitations of the standard e-beam lithography method for fabricating these delicate nano-photonic devices can be overcome by using unconventional lithography methods such as direct-write and gray-scale ion beam lithography, ion beam implantation lithography, a combination of atomic layer deposition and focused ion beam micromachining and last but not least by using two-photon photopolymerization (2PP). For instance, bottom-up growth of atomic layer deposition allows atomic scale control over the zone width while top-down micro-machining using focused ion beams allow freely selectable aspect ratios and tilt angles. In another approach, we took advantage of 2PP and fabricated high aspect ratio diffractive/refractive kinoforms out of low-loss polymeric materials for the first time. We will discuss the benefits of these methods over the conventional fabrication routes based on theoretical coupled wave theory calculations, direct imaging experiments as well as ptychographic coherent diffractive imaging.