Orientation of nanodomains of star-shaped (PMMA-b-PS)6 in thin films with different molecular weights
ORAL
Abstract
To apply block copolymer (BCP) to nanolithography, vertically oriented nanodomains in thin film are needed. When the chain architecture of BCPs was changed from linear to star shape, vertically oriented cylinders and lamellae were obtained by using only thermal annealing without any special treatment. This is because the vertical orientation is entropically favored over parallel oriented one.
Here, we study the effect of the molecular weight of (PMMA-b-PS)6 star shaped block copolymer on the orientation of nanostructres on a silicon oxide changed. When the molecular weight is small, but still larger than the critical molecular weight corresponding to the order-disorder transition (ODT), parallel orientation is observed. This is because the entropic loss arising from the formation of vertical oriented nanostructures is not large; thus the orientation of nanostructures is greatly affected by surface treatment of a substrate. On the other hand, at large molecular weights, the entropic penalty for parallel orientation becomes huge, resulting in vertical orientation.
Here, we study the effect of the molecular weight of (PMMA-b-PS)6 star shaped block copolymer on the orientation of nanostructres on a silicon oxide changed. When the molecular weight is small, but still larger than the critical molecular weight corresponding to the order-disorder transition (ODT), parallel orientation is observed. This is because the entropic loss arising from the formation of vertical oriented nanostructures is not large; thus the orientation of nanostructures is greatly affected by surface treatment of a substrate. On the other hand, at large molecular weights, the entropic penalty for parallel orientation becomes huge, resulting in vertical orientation.
–
Presenters
-
Soyeong Park
Pohang University of Science and Technology
Authors
-
Soyeong Park
Pohang University of Science and Technology
-
Chungryong Choi
Pohang University of Science and Technology
-
Kyuseong Lee
Pohang University of Science and Technology
-
Seungkyoo Park
Pohang University of Science and Technology
-
Eunseol Kim
Pohang University of Science and Technology
-
Jin Kim
Pohang University of Science and Technology