Low loss amorphous Ta2O5 coatings grown by reactive sputtering for dielectric mirrors used for gravitational wave detection
ORAL
Abstract
Amorphous tantala 500nm films are deposited using reactive sputtering of a tantalum target where growth temperatures are varied from room temperature to 600C. Thermally activated and tunneling mechanisms both contribute to the overall mechanical loss which can be measured through internal friction techniques. The thermally activated are measured at room temperature using Gentle Nodal Suspension and the tunneling are measured at temperatures below 10K using Double Paddle Oscillators. These results provide a deeper understanding of the energy dissipation in amorphous tantala due to both tunneling and thermally activated loss mechanisms.
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Presenters
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Keerti Shukla
Materials Science and Engineering, UC Berkeley
Authors
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Keerti Shukla
Materials Science and Engineering, UC Berkeley
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Manel Molina-Ruiz
Physics, UC Berkeley
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Matt Abernathy
United States Naval Research Laboratory
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Alena Ananyeva
LIGO Laboratory, California Institute of Technology, Pasadena, CA, USA, California Institute of Technology, LIGO Laboratory, California Institute of Technology
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Riccardo Bassiri
Department of Applied Physics, Ginzton Laboratory, Stanford University, Stanford, CA, USA, Applied Physics, Stanford University, E. L. Ginzton Laboratory, Stanford University, Ginzton Laboratory, Stanford University, E. L. Ginzton Laboratory, Stanford
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Martin Fejer
Department of Applied Physics, Ginzton Laboratory, Stanford University, Stanford, CA, USA, Stanford University, Applied Physics, Stanford University, E. L. Ginzton Laboratory, Stanford University, Ginzton Laboratory, Stanford University, E. L. Ginzton Laboratory, Stanford
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Eric Keith Gustafson
LIGO Laboratory, California Institute of Technology, Pasadena, CA, USA, California Institute of Technology, LIGO Laboratory, California Institute of Technology, LIGO Lab, California Institute of Technology
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Xiao Liu
United States Naval Research Laboratory, Code 7130, Naval Research Laboratory, Washington, DC, US Naval Research Laboratory
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Ashot Markosyan
Department of Applied Physics, Ginzton Laboratory, Stanford University, Stanford, CA, USA, Stanford University, Edward L. Ginzton Laboratory, Stanford University
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Thomas Metcalf
United States Naval Research Laboratory, Code 7130, Naval Research Laboratory, Washington, DC
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Gabriele Vajente
LIGO Laboratory, California Institute of Technology, Pasadena, CA, USA, LIGO Laboratory, California Institute of Technology
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Frances Hellman
Physics and Materials Science and Engineering, UC Berkeley, Physics, University of California, Berkeley, University of California, Berkeley, Department of Physics, University of California, Berkeley, and Materials Sciences Division, Lawrence Berkeley National Laboratory