Resonance Behavior of Graphene Resonators with Various Periodic Hole Pattern

In this presentation, the mechanical resonance behaviors of porous graphene resonator used for were studied. The goal of this research is to find an optimal geometric structure of drum-like graphene for with obtaining its mechanical resonance with high frequencies and high Q-factors. Resonance behavior of graphene drums with various periodic hole-patterns has been studied by using finite element modeling simulation. The geometry and number of hole structures on graphene were designed and fabricated according to the simulation modeling. Our simulation results suggest that the resonance frequency of the graphene drum gradually increases and then drops as the number of pores of the graphene increases from 0 to 100. In addition, the porous graphene resonator devices are experimentally realized by transferring a porous graphene membrane on substrate with a trench structure. Experimentally measured resonance frequencies and estimated quality factors of graphene resonator with various pore structures were compared to and analyzed by simulation results.